Multi-vane Throttle Valve Heat Shielding and Debris Protection
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Solution Overview
Problem
Multi-vane throttle valves in vacuum processing systems have limited capacity to shield high-vacuum pumps from heat and debris, compromising the integrity of the vacuum seal and the operational efficiency of the pumps.
Innovation Solution
A multi-vane throttle valve design featuring rotatable vanes with integrated cooling conduits and debris shields, along with a drive mechanism and reciprocal vane system, to provide linear conductance control and protect the vacuum pump from heat and debris, while maintaining vacuum seal integrity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If multi-vane valves are used to provide precise control of processing environment, then control precision is improved, but shielding capacity from heat and debris deteriorates
Solution Approach 1:
The valve is divided into multiple functional segments: process chamber vanes for flow control, pump protection vanes for shielding, and reciprocal vanes for enhanced protection. Each segment performs a specific function, allowing precise control while simultaneously providing comprehensive shielding against heat and debris.
Solution Approach 2:
The valve employs nested vane structures where pump protection vanes are positioned behind process chamber vanes, and reciprocal vanes extend from the process chamber vanes. This nested arrangement creates multiple layers of protection while maintaining compact design and precise control capability.
2Measurement precision
If rotatable vanes are used to provide linear conductance control, then control linearity is improved, but structural complexity deteriorates
Solution Approach 1:
The drive mechanism serves multiple functions: it rotates the process chamber vanes for conductance control, simultaneously positions the pump protection vanes, and coordinates the reciprocal vanes. This multi-functionality reduces the need for separate actuation systems and simplifies overall structure while maintaining precise linear conductance control.
Solution Approach 2:
A drive shaft acts as an intermediary element that transmits rotational motion from the actuator to multiple vane assemblies. This single intermediary component coordinates the movement of process chamber vanes, pump protection vanes, and reciprocal vanes, simplifying the control system while achieving linear conductance control.
3Object-affected harmful factors
If cooling conduits are integrated into vanes, then heat shielding capacity is improved, but manufacturing complexity deteriorates
Solution Approach 1:
The cooling conduits are merged directly into the vane structures, combining the shielding function and cooling function into single integrated components. This eliminates the need for separate cooling systems and reduces assembly steps, offsetting the increased manufacturing complexity of the vanes themselves with overall system simplification.
Solution Approach 2:
Cooling fluid is circulated through hydraulic conduits integrated into the vanes, using fluid dynamics to remove heat from the vane surfaces. This hydraulic cooling approach provides efficient heat dissipation while maintaining a compact design, balancing manufacturing complexity with enhanced heat shielding capacity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively controls gas flow and shields the vacuum pump from heat and debris, ensuring the integrity of the vacuum seal and extending the operational life of the pump by efficiently managing thermal and particulate exposure.
Implementation Method 1
each rotatable vane includes a cooling fluid pathway in fluid communication with and disposed longitudinally along each rotatable vane
Implementation Method 2
cooling fluid pathway in fluid communication with and disposed longitudinally along each rotatable vane
Data Source
AI summary
A multi-vane throttling valve for a vacuum process chamber includes a reciprocal vane pivotally connected to and extending backwardly away from a back side of each of a plurality of rotatable vanes, and a stationary reciprocal vane angling assembly fixed in a predefined position and having an assembly pin extending transversely toward the reciprocal vane a predefined distance sufficient to support the reciprocal vane whereby the stationary angling assembly causes the reciprocal vane to pivot in a range between a substantially parallel position with the respective rotatable vane and a transverse position with the respective rotatable vane when the respective rotatable vane is rotated.