Multi-vane Throttle Valve with Integrated Cooling and Debris Shielding
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Solution Overview
Problem
Multi-vane throttle valves in vacuum processing systems have limited capacity to shield high-vacuum pumps from heat and debris, which can lead to damage and inefficiency in maintaining correct process pressures.
Innovation Solution
A multi-vane throttle valve design with rotatable vanes that incorporate a cooling fluid pathway and a debris shield, where the vanes are interconnected to form a continuous flow path, and a drive mechanism that rotates the vanes to control gas flow, while maintaining a pressure differential and protecting the vacuum pump from debris and heat.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If multi-vane valves are used to provide precise control of process pressures, then control precision is improved, but the capacity to shield the vacuum pump from heat and debris is limited
Solution Approach 1:
The patent merges the throttling function with the shielding function by integrating debris shields and cooling channels into the vane structure. The vanes now simultaneously control gas flow and protect the vacuum pump from heat and debris, resolving the contradiction between control precision and shielding capacity.
Solution Approach 2:
The cooling channels are nested within the vane structure, and debris shields are integrated into the vane assembly. This nested design allows the shielding and cooling functions to be embedded within the control mechanism without compromising control precision.
2Adaptability or versatility
If rotatable vanes are used to provide linear control over full range of operation, then control range is improved, but the shielding capacity from heat and debris remains limited
Solution Approach 1:
The patent combines multiple functions into the vane assembly: throttling control, heat shielding, and debris protection. The rotatable vanes maintain their full-range control capability while the integrated shields and cooling channels provide comprehensive protection against heat and debris.
Solution Approach 2:
The vane assembly is designed as a multi-functional component that performs throttling control, heat shielding, and debris protection simultaneously. This universal design resolves the contradiction by making the control mechanism also serve as the shielding mechanism.
3Temperature
If cooling fluid pathways are added to rotatable vanes, then heat shielding capacity is improved, but device complexity increases
Solution Approach 1:
The cooling channels are nested within the vane structure, utilizing the existing vane geometry. This approach provides effective heat shielding without significantly increasing external dimensions or overall device complexity.
Solution Approach 2:
The patent uses fluid cooling pathways to remove heat from the vanes. By incorporating cooling channels that allow coolant flow through the vanes, the system actively manages thermal loads while maintaining a relatively compact design.
4Object-affected harmful factors
If debris shields are added to protect the vacuum pump, then protection capacity is improved, but device complexity increases
Solution Approach 1:
The debris shields are merged with the vane structure, forming an integrated assembly. This combination provides effective debris protection while minimizing the increase in device complexity by using the existing vane geometry and mounting mechanisms.
Solution Approach 2:
The debris shields are positioned within or adjacent to the vane structure, creating a nested configuration. This allows the shields to protect the vacuum pump from debris while maintaining a compact overall design without significantly increasing device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design effectively shields the vacuum pump from heat and debris, providing precise control over process pressures and extending the valve's operational range while maintaining efficiency and reliability.
Implementation Method 1
each rotatable vane includes a cooling fluid pathway in fluid communication with and disposed longitudinally along each rotatable vane
Implementation Method 2
Multi-vane valves work by throttling the gas in the process chamber to create a differential pressure across the valve
Data Source
Figure 1A~1B
Figure 2~3
Figure 4
AI summary
A multi-vane throttling valve for a vacuum process chamber includes a throttle chamber body having an inside exposed to the vacuum process chamber and an outside exposed to atmospheric pressure, the chamber body defining a through-opening for controlling vacuum within the vacuum process chamber, a plurality of rotatable vanes mounted within the through-opening for controlling a flow of gases through the through-opening where each rotatable vane includes a cooling flow pathway in fluid communication with and disposed longitudinally along each rotatable vane, and a drive mechanism disposed on and connected to an outside of the throttle chamber body for rotating the plurality of rotatable vanes to vary the flow of process gases.