Multi-Voltage Capacitor Layout for Capacitance and Breakdown Control

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Existing semiconductor capacitor designs face challenges in balancing capacitance and voltage stability across different voltage domains, with low voltage domains requiring high capacitance and low-k dielectric materials, while high voltage domains need to prevent dielectric breakdown.

Innovation Solution

The semiconductor arrangement employs alternating stacks of conductive and dielectric materials in both low and high voltage domains, using parallel capacitors in low voltage domains for increased capacitance and series capacitors in high voltage domains to reduce voltage stress and prevent breakdown, with specific material selections for each domain.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If high capacitance is used in low voltage domains, then voltage stability is improved, but dielectric material selection is constrained

Engineering Contradiction:
Improvevoltage stabilityVSAvoiddielectric material selection
Core Design Contradiction:
ReliabilityVSAdaptability or versatility

Solution Approach 1:

The patent divides the semiconductor device into multiple voltage domains (first voltage domain with lower voltage and second voltage domain with higher voltage), each with its own capacitor network. This segmentation allows different dielectric materials to be optimized for each domain's specific voltage requirements, resolving the constraint on material selection while maintaining voltage stability.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different dielectric materials are assigned to different voltage domains based on their specific requirements. The first voltage domain uses dielectric materials optimized for high capacitance and low-k properties, while the second voltage domain uses materials with higher breakdown voltages. This local optimization resolves the contradiction between voltage stability and material selection flexibility.

Inventive Principle:
Principle #3Local quality

2Reliability

If series capacitors are used in high voltage domains, then dielectric breakdown is prevented, but capacitance is reduced

Engineering Contradiction:
Improvedielectric breakdown preventionVSAvoidcapacitance
Core Design Contradiction:
ReliabilityVSQuantity of substance

Solution Approach 1:

The capacitor networks are segmented into series configurations in the high voltage domain, dividing the total voltage stress across multiple capacitors. This segmentation prevents dielectric breakdown by ensuring no single capacitor experiences voltage exceeding its breakdown threshold, while the combined capacitance meets the domain's requirements.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent employs composite capacitor structures combining multiple dielectric materials in series, where each material is selected for its breakdown voltage characteristics. This composite approach allows the system to achieve both high voltage tolerance and adequate capacitance by leveraging the complementary properties of different materials.

Inventive Principle:
Principle #40Composite materials

3Quantity of substance

If parallel capacitors are used in low voltage domains, then capacitance is increased, but voltage domain complexity increases

Engineering Contradiction:
ImprovecapacitanceVSAvoidvoltage domain complexity
Core Design Contradiction:
Quantity of substanceVSDevice complexity

Solution Approach 1:

The patent segments the low voltage domain into multiple parallel capacitor units, each contributing to the total capacitance. This segmentation increases capacitance while maintaining manageable complexity through modular design, where each capacitor unit can be independently optimized and manufactured.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The parallel capacitor network in the low voltage domain serves multiple functions: providing high capacitance for voltage stability, enabling low-k dielectric material usage, and maintaining compatibility with standard manufacturing processes. This multi-functionality reduces the need for additional complexity-handling mechanisms.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach effectively stabilizes voltage planes in both domains, enhancing capacitance in low voltage domains and preventing dielectric breakdown in high voltage domains, thereby improving overall semiconductor performance and reliability.

Implementation Method 1

a first capacitor network in a first voltage domain to stabilize an associated first power supply, the first capacitor network comprising a first capacitor connected in parallel with a second capacitor

Methodology Applied
Scientific EffectCapacitance: Capacitance

Implementation Method 2

a second capacitor network in a second voltage domain to stabilize an associated second power supply, the second capacitor network comprising a third capacitor connected in series with a fourth capacitor

Methodology Applied
Scientific EffectDielectric: Dielectric

Data Source

PatentUS12191248B2Semiconductor arrangement and method of making
Publication Date: 2025.01.07 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US12191248B2 patent drawing
  • US12191248B2 patent drawing
  • US12191248B2 patent drawing

AI summary

A method of forming a semiconductor arrangement includes forming a first capacitor in a first voltage domain and forming a second capacitor in the first voltage domain. The first capacitor is connected in parallel with the second capacitor. A third capacitor and a fourth capacitor are formed in a second voltage domain. The third capacitor is connected in series with the fourth capacitor. The first capacitor and the second capacitor are connected in parallel with a supply terminal of the first voltage domain and a reference terminal of the first voltage domain. The fourth capacitor is connected to a supply terminal of the second voltage domain. The third capacitor is connected to a reference terminal of the second voltage domain.