Multi-Wafer Inspection System Modular Prober Arrangement
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Solution Overview
Problem
The existing multi-wafer inspection systems are cumbersome and difficult to transport due to their large and heavy design, which complicates the installation process and makes it challenging to efficiently arrange conductive members within the system.
Innovation Solution
A multi-wafer inspection system is designed with a modular structure, featuring a first stage unit with multiple probers arranged side by side, a loader unit, a chiller unit, and a controller. The system includes conductive members that efficiently connect the probers to the controller through dedicated spaces, allowing for easy installation and reduced overall system size.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a multi-wafer inspection system uses multiple probers arranged in multiple stages to inspect multiple wafers simultaneously, then wafer inspection efficiency is improved, but the system becomes large and heavy, making it difficult to transport and install
Solution Approach 1:
The multi-wafer inspection system is divided into multiple independent stage units, where each stage unit can be manufactured and transported separately. Each stage unit contains a subset of probers and necessary support structures, allowing the overall system to be assembled from modular components rather than as a single large monolithic structure.
2Length of moving object
If the system size is reduced to improve transportability, then ease of transportation is improved, but the internal space becomes narrow, making it difficult to efficiently place and connect conductive members
Solution Approach 1:
Conductive members are routed through the vertical dimension by passing through holes formed in the stage unit, utilizing the thickness direction of the substrate. This three-dimensional routing approach allows conductive connections without requiring additional lateral space, effectively solving the space constraint problem while maintaining efficient electrical connections between probers and control circuits.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The modular design enables easy transportation and installation of the system, while the efficient arrangement of conductive members simplifies the connection process and reduces the system's overall size, improving both installation efficiency and operational effectiveness.
Implementation Method 1
a chiller unit for supplying a refrigerant to the multiple first probers
Data Source
AI summary
A multi-wafer inspection system is provided. A multi-wafer inspection system according to an aspect of the present invention is capable of simultaneously inspecting multiple wafers supplied thereto, and may comprise: a first stage unit comprising multiple first probers controlled such that the multiple wafers can be inspected individually, and disposed side by side in a first direction; a loader unit disposed in a second direction perpendicular to the first direction of the first stage unit such that the multiple wafers are supplied to the multiple first probers, respectively; a chiller unit for supplying a refrigerant to the multiple first probers; a controller disposed on the opposite side of the loader unit to the first direction in order to control the first probers; and multiple first conductive members for connecting the multiple first probers and the controller, respectively.