Multi-Wafer Vertical Integration for Low-Power Photonic Interconnects

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Solution Overview

Problem

Existing optic device structures face challenges with increased power consumption and heat generation due to long lead wires connecting optical engines and switches, which are separately mounted on substrates, hindering bandwidth density and miniaturization efforts.

Innovation Solution

A wafer-level stack structure is implemented where multiple substrates are bonded and vertically aligned to form optical engines, eliminating the need for separate cutting and bonding of electronic and photonic dies, reducing wire connections and integrating high-performance computing ICs to control optical engines.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If optical engines and switches are separately mounted on substrates and connected by long lead wires, then device assembly is simplified, but power consumption increases and heat generation increases

Engineering Contradiction:
Improvedevice assemblyVSAvoidpower consumption
Core Design Contradiction:
Ease of manufactureVSUse of energy by moving object

Solution Approach 1:

The patent merges the optical engine and switch into a single integrated photonic circuit chip, eliminating the need for separate mounting and long lead wire connections. This integration directly reduces power consumption and heat generation while maintaining manufacturing feasibility through advanced photonic fabrication processes

Inventive Principle:
Principle #5Merging (Combining)

2Ease of manufacture

If optical engines and switches are separately mounted on substrates and connected by long lead wires, then device assembly is simplified, but heat generation increases

Engineering Contradiction:
Improvedevice assemblyVSAvoidheat generation
Core Design Contradiction:
Ease of manufactureVSTemperature

Solution Approach 1:

The patent merges the optical engine and switch into a single integrated photonic circuit chip, eliminating the need for separate mounting and long lead wire connections. This integration directly reduces power consumption and heat generation while maintaining manufacturing feasibility through advanced photonic fabrication processes

Inventive Principle:
Principle #5Merging (Combining)

3Quantity of substance

If miniaturization continues to meet bandwidth density demand, then bandwidth density increases, but power consumption and heat generation continue to pose challenges

Engineering Contradiction:
Improvebandwidth densityVSAvoidpower consumption
Core Design Contradiction:
Quantity of substanceVSUse of energy by moving object

Solution Approach 1:

The patent merges the optical engine and switch into a single integrated photonic circuit chip, eliminating the need for separate mounting and long lead wire connections. This integration directly reduces power consumption and heat generation while maintaining manufacturing feasibility through advanced photonic fabrication processes

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent transitions from planar two-dimensional integration to three-dimensional vertical stacking of photonic and electronic components. This dimensional change enables higher bandwidth density while minimizing interconnect lengths and associated power consumption through vertical integration architecture

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

4Quantity of substance

If miniaturization continues to meet bandwidth density demand, then bandwidth density increases, but heat generation continues to pose challenges

Engineering Contradiction:
Improvebandwidth densityVSAvoidheat generation
Core Design Contradiction:
Quantity of substanceVSTemperature

Solution Approach 1:

The patent merges the optical engine and switch into a single integrated photonic circuit chip, eliminating the need for separate mounting and long lead wire connections. This integration directly reduces power consumption and heat generation while maintaining manufacturing feasibility through advanced photonic fabrication processes

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent transitions from planar two-dimensional integration to three-dimensional vertical stacking of photonic and electronic components. This dimensional change enables higher bandwidth density while minimizing interconnect lengths and associated power consumption through vertical integration architecture

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

5Use of energy by moving object

If wafer-level stack structure is implemented with multiple substrates bonded and vertically aligned, then wire lengths are minimized and power consumption is reduced, but manufacturing complexity increases

Engineering Contradiction:
Improvepower consumptionVSAvoidmanufacturing complexity
Core Design Contradiction:
Use of energy by moving objectVSDevice complexity

Solution Approach 1:

The patent performs preliminary alignment and bonding of multiple wafers at the wafer level before dicing into individual devices. This preliminary action enables precise vertical alignment and minimal wire lengths while simplifying subsequent manufacturing steps through standardized wafer-level processing techniques

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach minimizes power consumption and heat generation while enhancing bandwidth density by minimizing wire lengths and simplifying the fabrication process.

Implementation Method 1

bonding the first wafer to the second wafer to form a first stacked wafer

Methodology Applied
Scientific EffectBonding: Welding

Data Source

PatentUS12463181B2Multi-wafer integration
Publication Date: 2025.11.04 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US12463181B2 patent drawing
  • US12463181B2 patent drawing
  • US12463181B2 patent drawing

AI summary

Semiconductor devices and methods of forming the same are provided. A method according to the present disclosure includes forming a first wafer including a plurality of electronic integrated circuits (EICs), forming a second wafer including a plurality of photonic integrated circuits (PICs), bonding the first wafer to the second wafer to form a first stacked wafer. The bonding of the first wafer to the second wafer includes vertically aligning each of the plurality of the EICs with one of the plurality of the PICs.