Multi-Zone Ceramic Heater Resistance via Vertical Stacking
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Solution Overview
Problem
Increasing the number of heating zones in ceramic heaters for semiconductor wafers reduces the area of each zone, making it difficult to increase the resistance of heating elements, which in turn requires high current supply, posing practical challenges.
Innovation Solution
A multi-zone holding apparatus with a heat generation section comprising first and second heating elements connected in series through vias, allowing for increased resistance without expanding the zone area, enabling efficient heat generation with reduced current supply.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the number of heating zones is increased, then temperature control accuracy is improved, but the resistance of each heating element cannot be increased sufficiently
Solution Approach 1:
The patent transitions from a single-plane heating element layout to a multi-layer stacked configuration. Heating elements are arranged in multiple layers (first heating elements in a first plane, second heating elements in a second plane) stacked in the thickness direction. This spatial dimensionality change allows each heating zone to access multiple heating elements vertically, effectively increasing the resistance available in each heating zone without requiring larger planar areas, thus resolving the contradiction between increased zone count and sufficient resistance.
2Measurement precision
If the number of heating zones is increased, then temperature control accuracy is improved, but the current supply requirement increases
Solution Approach 1:
By stacking heating elements in multiple layers along the thickness direction, the patent increases the effective resistance in each heating zone without expanding the planar footprint. This vertical arrangement allows the system to maintain high temperature control accuracy with many zones while avoiding the need for high current supply, as higher resistance enables lower current operation for the same power output.
3Reliability
If the width of heating element is decreased to increase resistance, then heating element area is reduced, but the resistance increase is insufficient
Solution Approach 1:
Instead of decreasing the width of heating elements in the planar direction to increase resistance, the patent stacks multiple heating elements in the thickness direction. This approach increases the effective resistance by adding series-connected heating elements vertically, while maintaining adequate planar area for each heating element, thus avoiding the trade-off between element area and resistance.
Solution Approach 2:
The patent combines multiple heating elements (first heating elements and second heating elements) in a stacked configuration within each heating zone. By merging these elements in series, the total resistance of each heating zone is increased without requiring individual elements to be narrower, thereby maintaining sufficient element area while achieving the desired resistance increase.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration allows for effective heat generation in each zone with decreased current, achieving a remarkable downsizing of the power supply system while maintaining target heat generation levels.
Implementation Method 1
a heat generation section which is disposed in the holding substrate and generates heat when energized
Data Source
AI summary
A holding apparatus including a holding substrate having a first main face on one side in a thickness direction thereof, and a heat generation section which is disposed in the holding substrate and generates heat when energized. The heat generation section includes a plurality of first heating elements arrayed in a planar direction orthogonal to the thickness direction of the holding substrate, and a second heating element disposed on a side toward the first main face in the thickness direction with respect to the plurality of first heating elements. Any one of the plurality of first heating elements is electrically connected to the second heating element in series through a first via extending in the thickness direction within the holding substrate.