Multi-Zone Showerhead Structure for Separate Gas Delivery
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Solution Overview
Problem
In semiconductor processing, showerheads often experience premature mixing of gases, leading to defects and clogging, requiring aggressive purging to prevent gas mixing before delivery to the process chamber.
Innovation Solution
A multi-zone showerhead design with fluidly independent plenums and gas distribution plugs that maintain separate gas zones, preventing gas mixing and allowing for easy reconfiguration and maintenance, ensuring uniform gas flow to the substrate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple gases are delivered through a single showerhead, then gas mixing occurs, but this leads to defects and clogging
Solution Approach 1:
The showerhead is divided into multiple fluidly independent plenums (first plenum, second plenum, etc.) that are spatially separated and do not communicate with each other. Each plenum delivers a different gas through its own dedicated gas distribution plugs, preventing premature mixing while maintaining the ability to deliver multiple gases simultaneously
2Reliability
If aggressive purging is used to prevent gas mixing, then gas mixing is avoided, but processing time increases
Solution Approach 1:
The showerhead structure is designed with fluidly independent plenums that maintain gas separation during normal operation, eliminating the need for aggressive purging between gas deliveries. The physical separation of gas pathways prevents mixing from occurring in the first place, allowing immediate switching between gases without time-consuming purging cycles
3Device complexity
If a single-zone showerhead is used, then the structure is simple, but gas mixing occurs and maintenance is difficult
Solution Approach 1:
The showerhead is segmented into multiple fluidly independent plenums with dedicated gas distribution plugs for each gas type. This modular segmentation prevents gas mixing while maintaining reasonable structural complexity, and allows individual plenums to be maintained or replaced independently
Solution Approach 2:
The showerhead design allows for dynamic configuration where different plenums can be activated or deactivated based on process requirements. The fluidly independent plenums enable flexible gas delivery patterns while maintaining the integrity of each gas pathway
Data Source
AI summary
Embodiments of multi-zone showerheads are provided herein. In some embodiments, a multi-zone showerhead includes: a body having an outer surface and including a plurality of fluidly independent plenums; and a plurality of gas distribution plugs extending through the body, wherein at least one gas distribution plug includes a first internal gas passageway coupling a first plenum of the plurality of fluidly independent plenums to the outer surface and a second internal gas passageway coupling a second plenum of the plurality of fluidly independent plenums to the outer surface. In some embodiments, the body can include: a top plate; a bottom plate; and one or more intermediate plates disposed between the top plate and the bottom plate, wherein individual plenums of the plurality of fluidly independent plenums are respectively defined between adjacent plates of the top plate, the bottom plate, and the one or more intermediate plates.