Multiaxial Rotation Rate Sensor with Split Central Rotor
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Solution Overview
Problem
Existing rotation rate sensors require larger substrate surfaces and are sensitive to interfering influences like vibrations, lacking symmetry and robustness.
Innovation Solution
A multichannel rotation rate sensor design with coupled detection structures and an electrostatic comb drive, allowing for compact operation and reduced interference sensitivity through phase opposition and direct coupling of linear and rotational oscillating structures.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If a conventional rotation rate sensor design is used, then the sensor can detect rotation rates, but the substrate surface area required is large
Solution Approach 1:
The patent combines multiple detection structures (first and second detection structures) into a single integrated sensor system with a common drive structure. This merging allows the sensor to detect rotation rates about multiple axes while occupying a smaller substrate area, directly resolving the contradiction between compact size and measurement capability.
Solution Approach 2:
The patent utilizes three-dimensional structuring with detection structures extending in different spatial dimensions (parallel to third axis and fourth axis). By arranging detection elements in multiple dimensions rather than spreading them out in a single plane, the sensor achieves comprehensive rotation rate detection within a compact footprint.
2Object-affected harmful factors
If conventional rotation rate sensor designs are used, then rotation rates can be detected, but the sensor is sensitive to interfering influences like vibrations
Solution Approach 1:
The patent employs asymmetric coupling between the drive structure and detection structures, where the coupling is designed to be strong in the drive direction and weak in detection directions. This asymmetric coupling allows the sensor to be robust against vibrations while maintaining sensitivity to rotation rates, resolving the contradiction between vibration resistance and measurement reliability.
Solution Approach 2:
The patent introduces a coupling structure as an intermediary element between the drive structure and detection structures. This coupling structure mediates the interaction between drive and detection elements, allowing the system to reject vibration interference while transmitting rotation rate signals, thereby improving reliability without compromising vibration resistance.
3Stability of the object's composition
If conventional rotation rate sensor designs are used, then the sensor can function, but it lacks symmetry which reduces robustness
Solution Approach 1:
The patent employs a composite structural design combining drive and detection structures with specific coupling characteristics. This composite structure achieves high symmetry in the overall arrangement while maintaining asymmetric coupling properties, providing both structural stability and process variation resistance.
Solution Approach 2:
The drive structure serves multiple functions: it drives both the first and second detection structures, provides reference motion for differential measurement, and establishes symmetric geometric relationships. This multi-functionality enhances structural symmetry and robustness against process variations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient detection of rotation rates with reduced interference from vibrations, achieving high symmetry and mechanical robustness while minimizing costs.
Implementation Method 1
the drive device includes at least one electrostatic comb drive
Implementation Method 2
the first electrode and the second electrode having a generally plate-shaped design, and extending generally perpendicularly with respect to the main plane of extension, and being situated, at least partially, in each case in at least one recess of the particular detection structure
Data Source
AI summary
A multiaxial rotation rate sensor for detecting rotation rates on three mutually perpendicular rotation axes.