Vibration-robust Multiaxis Gyroscope with Anti-phase Proof Masses
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Solution Overview
Problem
Microelectromechanical (MEMS) gyroscopes face challenges in isolating desired oscillation modes from external disturbances, particularly in multiaxis designs, where robustness against external vibrations and interference between different frequencies is difficult to achieve, leading to noisy output signals and reduced sensitivity.
Innovation Solution
The use of two adjacent proof mass quartets, where each proof mass oscillates in anti-phase relative to the corresponding proof mass in the other quartet, allowing for synchronized and suppressed oscillation modes, and side-by-side placement for easy interconnection, enhances robustness against external vibrations and simplifies the design of electronic circuits.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple one-axis gyroscopes are incorporated for different axes of rotation, then multiaxis rotation measurement capability is achieved, but device complexity and electronic circuit interference increase
Solution Approach 1:
The patent combines multiple one-axis gyroscope measurements into a single integrated device structure where two proof mass quartets share common suspension arrangements and coupling elements. This merging approach enables multiaxis rotation measurement while reducing electronic circuit complexity by using shared components and synchronized oscillation modes rather than separate independent gyroscope circuits.
Solution Approach 2:
The proof mass quartets are designed to serve multiple functions simultaneously: they provide primary oscillation for z-axis measurement, enable x-axis and y-axis measurements through coupled oscillation modes, and share suspension arrangements with other quartets. This multi-functionality reduces the need for separate dedicated circuits for each axis measurement.
2Adaptability or versatility
If proof masses are given freedom to oscillate in many different directions for multiaxis measurement, then all secondary oscillation modes are available, but robustness against external vibrations decreases
Solution Approach 1:
The patent divides the proof mass system into distinct quartets (first and second quartets) with specific oscillation characteristics. Each quartet is designed to oscillate in anti-phase, creating segmented oscillation modes that are less susceptible to external vibrations while maintaining availability of multiple secondary oscillation modes for multiaxis measurement.
Solution Approach 2:
The patent employs anti-phase oscillation between corresponding proof masses in different quartets, where one mass moves in the opposite direction to another. This counterbalancing motion cancels out the effects of external vibrations and energy leakage, enhancing robustness while preserving the ability to measure rotations about multiple axes.
3Reliability
If two or four proof masses oscillate in anti-phase, then robustness against vibrations improves, but device complexity increases
Solution Approach 1:
The patent uses asymmetric placement and coupling of proof masses within the quartet structure, where specific masses are positioned and connected in non-uniform patterns. This asymmetric configuration enables anti-phase oscillation modes that provide vibration robustness while managing the overall device complexity through deliberate asymmetric design rather than symmetric complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration improves the robustness of multiaxis gyroscopes by effectively canceling undesired vibrations and energy leakage, resulting in more accurate and sensitive angular rotation rate measurements.
Implementation Method 1
a microelectromechanical gyroscope which comprises a first proof mass quartet and a second proof mass quartet... each proof mass oscillates in anti-phase compared to the corresponding proof mass in the other quartet
Data Source
AI summary
This disclosure describes a multiaxis gyroscope comprising a first proof mass quartet centered around a first quartet center point and a second proof mass quartet centered around a second quartet center point. The phase of the primary oscillation of each proof mass in the first proof mass quartet in relation to the first quartet center point is anti-phase in relation to the phase of the primary oscillation of the corresponding proof mass in the second proof mass quartet in relation to the second quartet center point. The phase of the primary oscillation of the first and second proof masses in each proof mass quartet in relation to the corresponding quartet center point is anti-phase in relation to the phase of the primary oscillation of the third and fourth proof masses in the same proof mass quartet in relation to the same quartet center point.