Multi-Beam Electron Detection Correction for Crosstalk Imaging
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Solution Overview
Problem
Multi-beam charged-particle microscope apparatuses face the challenge of crosstalk, where emitted electrons from one beam are detected by the wrong detector, leading to ghost images due to factors like sample charging and optical misalignment, making it difficult to obtain ideal images.
Innovation Solution
A processor system that communicates with the charged-particle microscope apparatus, using a correction detector to detect emitted electrons from multiple regions and correct the brightness signals to minimize crosstalk influence by calculating and adjusting for the crosstalk amount between detection signals.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a multi-beam charged-particle microscope apparatus is used for high-speed observation, then observation speed and productivity are improved, but crosstalk occurs between emitted electrons from different beams causing ghost images and reducing measurement precision
Solution Approach 1:
The patent applies feedback by using a correction detector to measure the actual crosstalk amount between beams, then using this measured information to calculate and apply correction coefficients to the detection signals. This closed-loop feedback mechanism allows the system to maintain high productivity while compensating for crosstalk effects, thereby resolving the contradiction between observation speed and measurement precision
Solution Approach 2:
The patent changes the parameter of detection signal processing by introducing correction coefficients that are calculated based on the measured crosstalk amount. These coefficients modify the detection signals to eliminate ghost images, allowing the system to maintain high observation speed while improving measurement precision through parameter adjustment
2Duration of action of stationary object
If sample charging occurs during observation, then the trajectory of emitted electrons changes causing crosstalk and ghost images, but the observation process continues without interruption
Solution Approach 1:
The patent performs preliminary action by continuously measuring the crosstalk amount using the correction detector during the observation process. This allows the system to detect trajectory changes caused by sample charging in advance and apply real-time corrections, maintaining both continuous observation capability and measurement precision
Solution Approach 2:
The patent applies dynamics by making the correction coefficients variable and adjustable in real-time based on the measured crosstalk amount. This dynamic adjustment allows the system to adapt to trajectory changes caused by sample charging, maintaining measurement precision throughout the continuous observation process
3Measurement precision
If a correction detector is added to measure crosstalk amount, then measurement precision is improved by reducing ghost images, but device complexity increases
Solution Approach 1:
The patent applies universality by designing the correction detector to serve multiple functions: it detects emitted electrons for normal imaging and simultaneously measures the crosstalk amount between beams. This multi-functionality allows the system to improve measurement precision without proportionally increasing device complexity, as the same hardware component performs multiple measurement tasks
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The processor system effectively reduces crosstalk influence, resulting in images closer to the ideal by accurately correcting brightness signals and eliminating ghost images, even in cases of temporal or local sample charging.
Implementation Method 1
a correction detector that detects a first emitted electron emitted from the first region and a second emitted electron emitted from the second region
Data Source
AI summary
A multi-beam charged-particle microscope apparatus 100 includes an irradiation system 104 that irradiates a plurality of regions on a surface of a sample 9 with a plurality of beams, a detection system 125 (correction detector 132 and imaging detector 131) that detects emitted electrons from the surface of the sample 9, and a controller 102 that generates a first brightness of a first pixel in a first region based on a first signal of a first detector of a multi-detector 123 and generates a second brightness of a second pixel in a second region based on a second signal of a second detector. A processor of a processor system 103 that can communicate with the charged-particle microscope apparatus 100 specifies a first crosstalk amount from a second emitted electron to the first signal based on the first brightness obtained from the charged-particle microscope apparatus 100 and an output of the correction detector 132 and corrects the first brightness based on the first crosstalk amount.