Multi-Beam Imaging Distortion Control Through Iterative Beam Tuning
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Solution Overview
Problem
Multi-beam imaging systems face challenges in controlling distortion due to the complexity and coupling effects of multiple particle beams, making it difficult to achieve precise image quality.
Innovation Solution
A controller adjusts multiple control parameters iteratively to minimize distortions by measuring changes in particle beams and calculating optimal parameter values using linear predictive modeling, enabling efficient distortion reduction.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If multiple particle beams are used for parallel imaging, then imaging productivity is improved, but distortion control difficulty increases
Solution Approach 1:
The patent segments the distortion control process into individual beam measurements. Each particle beam's distortion is measured and corrected independently through sequential adjustments of control parameters, breaking down the complex multi-beam control problem into manageable single-beam units that can be optimized separately and then combined.
2Manufacturing precision
If control parameters are adjusted to reduce distortion, then manufacturing precision is improved, but the number of control elements increases
Solution Approach 1:
The patent applies universality by using a single set of control parameters that simultaneously affect multiple particle beams. By measuring distortion in individual beams and adjusting these universal control elements, the system achieves precise distortion control across all beams without requiring separate control mechanisms for each beam, thus reducing overall device complexity.
Data Source
AI summary
A system may include a controller couplable to an imaging sub-system utilizing multiple particle beams, where the imaging sub-system includes one or more control elements to manipulate the two or more particle beams that are adjustable with two or more control parameters. The controller may select values of the two or more control parameters by iteratively performing steps until one or more termination conditions are met. For example, the controller may receive measurements of changes of distortions of the particle beams resulting from individual adjustments of the control parameters. The controller may further calculate values of the control parameters that reduce the distortions of the particle beams based on the changes of the distortions resulting from the individual adjustments. The controller may further direct the adjustment of the values of the control parameters to the calculated values.