Multi-Beam Electron Optics With Tunable Amplification for Defect Imaging
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Solution Overview
Problem
Current charged-particle assessment tools, such as SEMs, face challenges in achieving high-resolution images due to limitations in detail and signal amplification, which affects the detection and identification of micro and nano-scale defects on semiconductor IC chips, impacting yield and throughput in manufacturing.
Innovation Solution
A multi-beam electron-optical system comprising an objective lens array assembly, a detector array, and a tunable amplifier circuit that projects multiple sub-beams onto a sample and detects charged particles, allowing for adjustable signal amplification to enhance image resolution and detail.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a single electron beam is used for inspection, then the equipment complexity is low, but the image resolution and inspection speed are limited
Solution Approach 1:
The patent divides a single electron beam into multiple sub-beams using a beam splitting element, creating a multi-beam system that inspects different areas simultaneously. This segmentation increases measurement precision and inspection speed while keeping the overall system architecture relatively simple and modular.
Solution Approach 2:
The patent combines multiple sub-beams into a coordinated inspection system where each sub-beam contributes to the overall image. By merging the detection capabilities of multiple beams and processing their signals together, the system achieves high-resolution imaging with improved throughput without proportionally increasing complexity.
2Measurement precision
If signal amplification is increased to improve detection sensitivity, then the detection precision improves, but the noise amplification and signal distortion increase
Solution Approach 1:
The patent implements a feedback mechanism where the system monitors the detected signals and adjusts amplification levels dynamically. This feedback control allows the system to optimize detection sensitivity while compensating for noise and distortion, maintaining signal quality even at higher amplification levels.
Solution Approach 2:
The patent uses dynamic signal processing where amplification and processing parameters are adjusted in real-time based on the detected signal characteristics. This dynamic approach allows the system to maximize detection sensitivity for weak signals while preventing excessive noise amplification and maintaining overall signal integrity.
3Productivity
If multiple sub-beams are used to increase inspection speed, then the productivity improves, but the system complexity and calibration difficulty increase
Solution Approach 1:
The patent segments the inspection task across multiple sub-beams that operate in parallel, significantly increasing inspection speed and productivity. Each sub-beam handles a portion of the sample, allowing simultaneous detection across multiple areas without requiring complex coordination between beams.
Solution Approach 2:
The patent designs the multi-beam system with universal components that perform multiple functions. The beam splitting element, detector array, and signal processing system are configured to handle multiple beams simultaneously using the same basic architecture, reducing overall system complexity despite the increased number of beams.
4Measurement precision
If the detector array resolution is increased to improve image detail, then the measurement precision improves, but the data processing complexity and readout time increase
Solution Approach 1:
The patent performs preliminary signal processing and filtering at the detector level before full data acquisition. By pre-processing signals from the detector array and filtering out irrelevant information early in the detection chain, the system reduces the complexity and time required for subsequent data processing while maintaining high image detail.
Solution Approach 2:
The patent extracts only the essential signal information from the detector array output, separating relevant detection data from redundant information. This extraction approach allows the system to maintain high measurement precision while significantly reducing the volume of data requiring complex processing, thereby decreasing readout and processing time.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system improves image resolution and detail, enabling more effective detection and identification of defects, thereby enhancing manufacturing yield and throughput by optimizing signal amplification and processing.
Implementation Method 1
an objective lens array assembly comprising a plurality of objective lenses, each configured to project one of a plurality of charged-particle beams onto a sample
Implementation Method 2
a current detector array configured to detect charged-particles emitted from a sample by reference to their charge
Implementation Method 3
a circuit comprising an amplifier in data communication with the detector array; wherein the amplifier is configured to be tunable in order to tune amplification of signals from the detector array
Data Source
AI summary
A multi-beam electron-optical system for a charged-particle assessment tool, the system comprising:an objective lens array assembly comprising a plurality of objective lenses, each configured to project one of a plurality of charged-particle beams onto a sample;a detector array associated with the objective lens array assembly and configured to detect charged-particles emitted from the sample; anda circuit comprising an amplifier in data communication with the detector array;wherein the amplifier is configured to be tunable in order to tune amplification of signals from the detector array.