Multi-beam Tool Field-free Space Interval for Data Path Access
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The compact arrangement of charged-particle optical columns in multi-beam processing apparatuses makes it difficult to provide data path access for controlling the multitude of deflector devices, as there is limited space for data lines to pass between the closely packed sub-columns, which is essential for efficient pattern writing and structuring on targets.
Innovation Solution
Incorporating a beam shaping device with first and second field-boundary devices that define a field-free space interval to accommodate data path lines, allowing access to the deflection array device without modifying the optical properties of the lens elements, and providing magnetic and/or electric shielding tubes to protect the data path lines from electromagnetic interference.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If charged-particle optical columns are arranged compactly to increase throughput, then productivity is improved, but data path access becomes difficult due to limited space for data lines
Solution Approach 1:
The patent introduces a field-free space interval between the first and second field-boundary devices, creating a new spatial dimension within the beam shaping device structure. This interval accommodates data path lines without requiring lateral expansion, thus maintaining compact column arrangement while enabling data access through the longitudinal dimension of the beam path.
Solution Approach 2:
The data path lines are nested within the field-free space interval that is itself nested between the field-boundary devices within the beam shaping device. This nested arrangement allows data lines to be housed within the existing optical column structure without adding external bulk, preserving compactness while providing necessary access pathways.
2Device complexity
If field-boundary devices are positioned closer to maintain compactness, then device complexity is reduced, but electromagnetic interference increases without shielding
Solution Approach 1:
Magnetic and/or electric shielding tubes are introduced as intermediary elements between the data path lines and the electromagnetic fields generated by the charged-particle optical systems. These shielding tubes act as mediators that block electromagnetic interference from reaching the data lines, allowing compact arrangement without compromising signal integrity.
Solution Approach 2:
The patent converts the potentially harmful electromagnetic interference into a manageable parameter by using shielding tubes that contain and direct electromagnetic fields. The shielding structures transform the harmful scattered electromagnetic radiation into contained field paths, protecting sensitive data lines while maintaining overall system compactness.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables efficient data path access while maintaining a compact arrangement of multiple columns, ensuring high throughput and effective cooling of the beam shaping devices, thereby facilitating precise control over the pattern definition and projection of sub-beams onto the target.
Implementation Method 1
Each particle-optical column comprises an illumination system, a beam shaping device, and a projection optics system. The illumination system serves to produce a respective beam and form it into a (preferably, substantially telecentric) beam illuminating the shaping means.
Implementation Method 2
an aperture array device provided with a multitude of apertures, each of said apertures defining the shape of a respective sub-beam having a nominal path towards the target
Implementation Method 3
a deflection array device for deflecting (only) selected sub-beams off their respective nominal path so that sub-beams thus selected do not reach the target
Implementation Method 4
The projection optics system serves to project an image of the beam shape defined in the shaping means onto the target.
Implementation Method 5
providing magnetic and/or electric shielding tubes to protect the data path lines from electromagnetic interference
Data Source
Figure 1
Figure 2
Figure 3A
AI summary
In a charged-particle multi-beam processing apparatus for exposure of a target with a plurality of parallel particle-optical columns, each column has a beam shaping device (512) forming the shape of the illuminating beam (50) into a desired pattern composed of a multitude of sub-beams (51, 52), by means of an aperture array device (520), which defines the shape of a respective sub-beam by means of an array of apertures (24), and a deflection array device (520) selectively deflecting sub-beams (52) off their nominal paths; thus, only the non-selected sub-beams (51) can reach the target. According to the invention each beam shaping device (512) is provided with a first field-boundary device (510) and a second field-boundary device (540), which are the first and last plate elements traversed by the beam (50, 57). One of the first and second field-boundary devices defines a field-free space interval (h1, h2) so as to accommodate feeding lines (104) for controlling the deflection array device (520).