3D Multibeam Focus Generation With Depth-Adaptive Wavefronts

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Existing photon beam focusing technologies are limited in their ability to generate multiple foci with defined optical quality across various materials and depths, often requiring sequential focusing and being restricted by technical limitations in throughput and adaptability to different materials and refractive indices.

Innovation Solution

A device that splits a photon beam into multiple component beams, allowing simultaneous focusing at a predetermined focal depth with adaptable wavefronts to ensure consistent optical quality across different depths, using components like deformable mirrors and spatial light modulators to adjust wavefronts based on focal depth.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If sequential focusing is used to generate multiple foci, then system complexity is reduced, but productivity decreases due to time restrictions

Engineering Contradiction:
Improvenumber of foci generated per unit timeVSAvoidsystem complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The photon beam is segmented into multiple component beams using a beam splitting device, allowing simultaneous generation of multiple foci. Each component beam can be independently focused to a different position within the material, enabling parallel processing without increasing overall system complexity

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent extends focusing capability from a single focal plane to three-dimensional space by enabling independent focal depth control for each component beam. This allows foci to be positioned at different depths (z-coordinate) and lateral positions (x-y coordinates), creating a 3D focus distribution that increases productivity without proportionally increasing device complexity

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Adaptability or versatility

If focusing is performed at different focal depths, then versatility is improved, but manufacturing precision deteriorates due to optical quality variations

Engineering Contradiction:
Improvefocal depth rangeVSAvoidoptical quality consistency
Core Design Contradiction:
Adaptability or versatilityVSManufacturing precision

Solution Approach 1:

Each component beam is assigned a customized wavefront adaptation tailored to its specific focal depth and target position. The wavefront adapting device applies location-specific optical corrections, ensuring that each focus maintains optimal optical quality regardless of its depth within the material. This local optimization approach maintains manufacturing precision across the entire focal depth range

Inventive Principle:
Principle #3Local quality

3Manufacturing precision

If wavefront adaptation is applied to each component beam, then manufacturing precision is improved, but device complexity increases

Engineering Contradiction:
Improveoptical quality of fociVSAvoidwavefront adaptation complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

A single wavefront adapting device is designed to handle multiple component beams simultaneously, applying independent wavefront corrections to each beam. This universal device performs the function of multiple individual wavefront adaptors, maintaining manufacturing precision for all foci while avoiding the need for separate adaptation mechanisms for each beam, thus limiting the increase in device complexity

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables parallel generation of multiple foci with consistent optical quality across the entire depth of a material, significantly reducing processing time and improving throughput, particularly beneficial for applications like lithography and microfluidic device manufacturing.

Implementation Method 1

a means for adapting the wavefronts of the component beams based at least in part on the focal depth

Methodology Applied
Scientific EffectWavefront adaptation: Reflection

Implementation Method 2

using components like deformable mirrors and spatial light modulators to adjust wavefronts based on focal depth

Methodology Applied
Scientific EffectOptical modulation: Phase Modulation

Implementation Method 3

a means for focusing the component beams at a predetermined focal depth within the material

Methodology Applied
Scientific EffectOptical focusing: Lens

Data Source

PatentEP4275833A1Multibeam 3-d focus generator
Publication Date: 2023.11.15 CARL ZEISS SMT GMBH
  • EP4275833A1 patent drawingFigure 1a~1b
  • EP4275833A1 patent drawingFigure 2
  • EP4275833A1 patent drawingFigure 3

AI summary

The invention relates to a device for focusing a photon beam into a material. The device comprises: means for splitting the photon beam into a plurality of component beams; means for focusing the component beams at a predetermined focal depth within the material; means for adapting the wavefronts of the component beams based at least in part on the focal depth.