Multi-Beam Particle Microscope Lens Alignment With Actuator Fixing
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Solution Overview
Problem
Current multi-beam particle microscopes require lengthy and costly manual alignment of magnetic lenses, which is challenging and time-consuming, especially when integrated into production installations.
Innovation Solution
An electrically controllable mechanical alignment and fixing mechanism with an actuator system is introduced to align and fix magnetic lenses in a multi-beam particle microscope, allowing for rapid and precise alignment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If manual alignment of magnetic lenses is used, then alignment precision can be achieved, but alignment time becomes excessively long and costly
Solution Approach 1:
The patent replaces manual mechanical alignment operations with an automated alignment system that uses electronic actuators to position magnetic lenses. The system incorporates sensors to detect lens positions and a controller to automatically adjust lens positions, eliminating the need for manual intervention while maintaining alignment precision and dramatically reducing alignment time.
2Ease of operation
If manual alignment procedures are employed, then alignment can be performed, but the process becomes challenging and time-consuming
Solution Approach 1:
The alignment system performs self-alignment through automated feedback control. Sensors continuously monitor the positions of magnetic lenses and provide real-time data to the controller, which automatically adjusts lens positions to achieve optimal alignment without requiring operator intervention or expertise in alignment procedures.
Solution Approach 2:
The system incorporates a feedback mechanism where sensors detect the actual positions of magnetic lenses and transmit this information to the controller. The controller compares detected positions with target positions and automatically adjusts lens positions to eliminate deviations, ensuring accurate and repeatable alignment results.
3Manufacturing precision
If multiple magnetic lenses are aligned manually, then each lens can be positioned, but the overall process becomes excessively lengthy
Solution Approach 1:
The alignment system divides the alignment process into independent, simultaneously controllable segments for each magnetic lens. Each lens is equipped with its own actuator and sensor, allowing individual positioning control. The controller can manage multiple lenses in parallel, aligning several lenses simultaneously rather than sequentially, thereby maintaining high positioning precision while dramatically increasing alignment throughput.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution significantly reduces alignment time and improves precision by approximately a factor of 100 compared to manual methods, enabling more efficient and accurate operation of multi-beam particle microscopes.
Implementation Method 1
an electrically controllable mechanical alignment and fixing mechanism with an actuator system is provided for the at least one alignable magnetic lens, the mechanism being configured to mechanically align and mechanically fix a position of the at least one alignable magnetic lens
Implementation Method 2
a magnetic and/or electrostatic objective lens, through which both the first and the second individual particle beams pass
Implementation Method 3
a multi-beam generator, which is arranged downstream of the condenser lens system in the direction of the beam path of the particles
Data Source
AI summary
For aligning magnetic lenses in a multi-beam particle microscope, an electrically controllable mechanical alignment and fixing mechanism with an actuator system is provided for at least one global alignable magnetic lens. The mechanism is configured to mechanically align and mechanically fix a position of the at least one alignable magnetic lens in the particle optical beam path in a plane orthogonal to the optical axis of the multi-beam particle microscope. A controller is configured to electrically control the electrically controllable mechanical alignment and fixing mechanism.