Multi-Beam Particle Microscope Real-Time Image Stitching
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Solution Overview
Problem
Multi-beam particle microscopes face challenges in processing large amounts of data and efficiently scanning large objects due to complex particle optics and limited field of view, requiring efficient data processing and image stitching methods to enhance throughput and user control.
Innovation Solution
A multi-beam particle microscope system with a data acquisition system that includes a control computer and image recording systems to generate high and low-resolution images, allowing for real-time processing and display of images, along with a method for efficiently scanning large regions by dividing the area of interest into tessellated pieces and stitching particle-microscopic images.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If multiple individual-beam particle microscopes are provided to scan multiple objects simultaneously, then the scanning throughput is improved, but the device complexity and cost increase significantly
Solution Approach 1:
The patent combines multiple particle beams into a single multi-beam particle microscope system, where multiple beams are guided through shared particle optics and controlled by a unified control system. This merging approach allows simultaneous scanning of multiple objects or regions while avoiding the need for multiple separate microscope systems, thereby improving throughput without proportionally increasing device complexity
Solution Approach 2:
The multi-beam particle microscope is designed with universal particle optics that can handle and direct multiple particle beams simultaneously. The system provides multi-functional capabilities by enabling parallel scanning of multiple objects or multiple regions of interest using a single instrument, making the system more versatile and cost-effective compared to multiple individual microscopes
2Productivity
If the field of view is increased to scan larger objects, then the scanning time is reduced, but the image resolution decreases
Solution Approach 1:
The patent divides the large field of view into multiple smaller sub-regions or tiles that can be scanned individually by the particle beam. The beam scans each sub-region with high resolution, and the resulting images are then computationally stitched together to form a complete high-resolution image of the entire large object. This segmentation approach maintains high image resolution while enabling scanning of large objects by breaking them into manageable portions
Solution Approach 2:
The system transitions from a single two-dimensional scanning plane to a multi-dimensional approach by scanning multiple sub-regions across a larger field of view and combining them. The computational stitching process adds a third dimension of data integration, allowing the system to achieve both large overall coverage and high local resolution by operating in this extended dimensional space
3Productivity
If multiple detectors are used to detect particle beams from multiple locations, then the data acquisition speed is improved, but the data processing complexity increases
Solution Approach 1:
The patent introduces a central control system and data processing unit that acts as an intermediary between multiple detectors and the final image reconstruction. This intermediary coordinates the data from multiple detectors, manages the stitching process, and produces the final composite images. By centralizing the complex processing tasks, the system can handle multiple detectors efficiently without distributing complexity across the entire system
4Measurement precision
If high-resolution images are captured for the entire field of view, then the image quality is improved, but the data storage requirements and processing time increase
Solution Approach 1:
The patent segments the large field of view into multiple smaller sub-regions and processes them independently. Each sub-region is scanned and processed at high resolution, but the smaller size of individual sub-regions reduces the computational burden compared to processing the entire large field of view as a single image. This segmentation enables high-quality imaging while making the processing time manageable through parallel or sequential processing of smaller data units
Solution Approach 2:
The system applies partial processing by first capturing and processing essential regions of interest at high resolution, while using lower resolution for less critical areas or using selective processing techniques. This approach maintains high image quality where needed while reducing overall processing time and data storage requirements by avoiding unnecessary high-resolution processing of entire fields of view
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient scanning of large objects and regions of interest by processing large datasets in real-time, improving throughput and user control, while maintaining high image resolution and reducing data redundancy.
Implementation Method 1
a multi-beam source configured to generate a first field of a plurality of first particle beams
Implementation Method 2
first particle optics, which are configured to direct the first particle beams onto an object
Implementation Method 3
a detector which has a plurality of detection regions... configured to generate an electrical signal representing a particle intensity incident on the detection region
Implementation Method 4
second particle optics, which are configured to direct second particle beams, emanating from the locations of incidence in the second field from locations of incidence at the object, to the detection regions
Data Source
AI summary
A multi-beam particle microscope includes first particle optics in order to direct particle beams onto an object, a detector with detection regions, with a transducer being assigned to each detection region, and a data acquisition system, which has a control computer system, image recording computer systems and a screen. The image recording computer systems receive electrical signals from the transducers and generates a first file, which represents a high resolution image, and a second file, which represents a low resolution image. The control computer system maintains a data structure which represents an assignment of transducers to two-dimensional spatial vectors and depicts the images on the screen, wherein a reference point in each image is arranged on the screen in a coordinate system of the screen at a location which is defined by a sum of a leading vector, which is the same for all images, and the spatial vector.