Multi-Beam Particle Microscope Data Tiering for Faster 3D Imaging
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Solution Overview
Problem
Existing multi-beam particle microscopes face challenges in efficiently imaging and processing large 3D samples, particularly in reducing overhead image processing times to validate data before destructive delayering steps.
Innovation Solution
A multi-beam particle microscope system with a computer system featuring a multi-tier architecture, where data processing is parallelized across multiple processing systems with minimal data exchange between tiers, allowing for real-time image processing and validation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a multi-beam particle microscope is used to image large 3D samples, then the scanning speed and productivity are improved, but the data processing time and system complexity increase
Solution Approach 1:
The system divides the large 3D sample into multiple smaller fields of view that can be scanned simultaneously by multiple particle beams. Each beam scans a specific region, and the data from all beams are processed in parallel through a multi-tier computer system architecture, thereby increasing productivity without proportionally increasing overall system complexity
Solution Approach 2:
The patent transitions from single-beam sequential scanning to multi-beam parallel scanning by adding spatial dimensionality to the beam arrangement. Multiple beams operate simultaneously on different regions of the sample, effectively utilizing the spatial dimension to increase scanning throughput while managing complexity through systematic data processing
2Measurement precision
If high resolution imaging is used to achieve nanometre voxel size, then the measurement precision is improved, but the data processing time and loss of time increase
Solution Approach 1:
The system performs preliminary data processing and validation in real-time during the imaging process. The multi-tier computer system begins processing data from multiple beams simultaneously as data becomes available, rather than waiting for complete data acquisition, thereby reducing overall processing time while maintaining nanometre resolution
Solution Approach 2:
The patent implements continuous data processing across multiple tiers where processing begins as soon as data is acquired from any beam. This continuous action eliminates idle time between data acquisition and processing, maintaining high measurement precision while minimizing time loss through overlapping acquisition and processing operations
3Productivity
If multiple single-beam particle microscopes are used to scan multiple objects simultaneously, then the productivity is improved, but the device complexity and cost increase
Solution Approach 1:
The patent merges multiple particle beams into a single multi-beam particle microscope system that shares common particle optics and control infrastructure. This consolidation allows parallel scanning of multiple regions or objects while avoiding the need for completely separate microscope systems, thereby improving productivity without proportionally increasing device complexity or cost
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach significantly reduces processing times and enhances the speed of imaging 3D samples layer by layer, enabling faster and more accurate reverse engineering of complex structures like integrated circuits.
Implementation Method 1
a multi-beam source configured to generate a first array of a plurality of first particle beams; first particle optics configured to direct the first particle beams onto an object so that the first particle beams are incident at locations of incidence on the object, which form a second array
Implementation Method 2
a detector including a plurality of detection regions or a plurality of detectors which each have at least one detection region, the detection regions being arranged in a third array, the detector or detectors including a plurality of transducers, a transducer being assigned to each detection region and configured to generate an electrical signal representing a particle intensity incident on the detection region
Implementation Method 3
a second particle optics configured to direct second particle beams emitted from locations of incidence in the second array to the third array of detection regions so that each second particle beam is incident on at least one of the detection regions arranged in the third array
Data Source
AI summary
A system includes a multi-beam particle microscope for imaging a 3D sample layer by layer, and a computer system with a multi-tier architecture is disclosed. The multi-tier architecture can allow for an optimized image processing by gradually reducing the amount of parallel processing speed when data exchange between different processing systems and/or of data originating from different detection channels takes place. A method images a 3D sample layer by layer. A computer program product includes a program code for carrying out the method.