Multi-Beam Charged Particle Optics for Faster Axis Adjustment
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Solution Overview
Problem
Existing charged particle beam devices with multiple detectors face complexity in adjusting parameters due to interdependence, leading to increased time and reduced usability when adjusting image contrast and brightness across multiple detectors.
Innovation Solution
A charged particle beam device equipped with an optical system, detectors, storage units, an evaluation value derivation unit, and a GUI that allows for simultaneous adjustment of parameters across multiple detectors, enabling efficient parameter adjustment while displaying an overhead view of all beam states.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If parameters of multiple detectors are adjusted individually using conventional methods, then each detector's image quality can be optimized, but the adjustment process becomes complicated and time-consuming
Solution Approach 1:
The patent combines multiple detector images into a single composite image that displays overall beam state information. This merging approach allows users to adjust parameters for multiple detectors simultaneously by observing the composite image, rather than adjusting each detector individually, thereby reducing adjustment time while maintaining image quality.
Solution Approach 2:
The composite image serves multiple functions: it displays individual detector images, shows beam state information, and provides a basis for simultaneous parameter adjustment. This multi-functional display enables a single operation to achieve what previously required multiple separate adjustment processes.
2Loss of information
If multiple detectors are used to capture comprehensive beam state information, then the overall beam state can be monitored, but the parameter adjustment becomes complex due to interdependence between detectors
Solution Approach 1:
By merging multiple detector images into a single composite display, the system maintains comprehensive beam state information while simplifying the adjustment interface. The composite image integrates information from all detectors, allowing users to understand beam states across all detectors without managing multiple separate adjustment procedures.
Solution Approach 2:
The composite image can be segmented to show individual detector regions while maintaining the overall view. This segmentation allows users to identify which specific detector requires adjustment while still seeing the context of all detectors, reducing the complexity of parameter adjustment by providing targeted guidance.
3Manufacturing precision
If parameters are adjusted based on individual detector images, then each detector can be optimized, but the interdependence between detectors makes it difficult to achieve optimal settings in one display
Solution Approach 1:
The composite image provides a universal view that incorporates information from all detectors, enabling users to make adjustments that account for interdetector dependencies. By displaying beam state information from all detectors in a single view, the system allows optimization of individual detectors while considering their interrelationships, achieving better results in fewer adjustment cycles.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution improves adjustment efficiency by allowing simultaneous adjustment of multiple detectors' parameters, reducing the time required for parameter adjustment and enhancing usability by providing an overview of all beam states.
Implementation Method 1
an optical system configured to irradiate a sample with a plurality of primary charged particle beams
Implementation Method 2
a detector configured to individually detect a plurality of secondary charged particle beams emitted from the sample
Data Source
AI summary
When adjusting optical axes of a multi-beam charged particle beam device, because parameters of optical systems are inter-dependent, the time required to adjust the parameters increases. Thus, the present invention provides a charged particle beam device provided with an optical parameter setting unit for setting parameters of optical systems for emitting a plurality of primary charged particle beams to a sample, detectors for individually detecting a plurality of secondary charged particle beams discharged from the sample, a plurality of memories for storing signals detected by the detectors and converted into digital pixels in the form of images, evaluation value derivation units for deriving evaluation values of the primary charged particle beams from the images, and a GUI capable of displaying the images and receiving an input from a user, wherein the GUI displays the images and evaluation results based on the evaluation values and changes various optical parameters in real-time.