Multi-Beam Particle Optics for Flexible Beam Current and Resolution
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Solution Overview
Problem
Existing multi-beam particle microscopes face limitations in optimizing resolution due to fixed numerical aperture and beam current settings, which restrict flexibility in imaging and require structural modifications to adjust these parameters.
Innovation Solution
A particle beam system with a pre-multi-lens array and a multi-lens array, along with a controller for adjustable excitations, allows for independent optimization of beam current and numerical aperture over large ranges without structural changes, enabling flexible adjustment of beam current intensity and pitch.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the numerical aperture is increased to improve resolution, then the resolution is improved, but the beam current must be increased which reduces resolution due to space charge effects
Solution Approach 1:
The patent divides the beam current control into multiple independent stages using a first multi-aperture plate and a second multi-aperture plate, each with multiple independently controllable apertures. This segmentation allows the beam current to be adjusted in fine increments by selectively opening or closing individual apertures, enabling precise control of beam current while maintaining optimal numerical aperture for high resolution imaging.
Solution Approach 2:
The patent implements dynamic control of beam current through electronically controllable aperture openings in both the first and second multi-aperture plates. The aperture openings can be dynamically adjusted during operation to optimize the balance between beam current and numerical aperture, allowing the system to adapt to different imaging requirements without physical reconfiguration.
2Illumination intensity
If the beam current is increased to improve signal strength, then the signal strength is improved, but the resolution deteriorates due to increased space charge effects
Solution Approach 1:
The patent segments the beam current control into multiple stages with the first multi-aperture plate controlling the overall beam current and the second multi-aperture plate providing fine-adjustment control. This segmented approach allows independent optimization of signal strength (through overall current level) and resolution (through precise current control at the second stage), eliminating the trade-off between these parameters.
Solution Approach 2:
The patent changes the control parameter from a single beam current setting to multiple independently controllable aperture openings in two separate multi-aperture plates. This parameter change enables precise adjustment of beam current to optimize the balance between signal strength and resolution, allowing the system to operate at optimal points for different imaging conditions.
3Measurement precision
If the numerical aperture is optimized for one working point, then the resolution is optimized for that point, but the system lacks flexibility to optimize for other working points
Solution Approach 1:
The patent implements dynamic control of the beam current through electronically controllable aperture openings in both multi-aperture plates. This dynamic control allows the numerical aperture and beam current to be optimized for different working points during operation, providing flexibility to adapt to various imaging requirements without physical reconfiguration of the system.
Solution Approach 2:
The patent creates a universal control mechanism that can optimize the system for multiple different working points using the same hardware configuration. The combination of two multi-aperture plates with independently controllable openings provides a universal solution that can adapt to different beam currents and numerical apertures as needed, eliminating the need for system modifications for different operating conditions.
4Adaptability or versatility
If structural modifications are made to adjust numerical aperture and beam current, then the flexibility is improved, but the device complexity increases
Solution Approach 1:
The patent replaces mechanical structural modifications with an electronically controlled aperture system. Instead of physically reconfiguring the optical path or changing lens parameters, the system uses electronically controllable aperture openings in two multi-aperture plates to adjust beam current and numerical aperture. This substitution of mechanical adjustment with electronic control reduces device complexity while maintaining or improving flexibility.
Solution Approach 2:
The patent achieves flexibility through parameter changes in the aperture openings rather than structural modifications. By controlling the size and configuration of aperture openings in the two multi-aperture plates, the system can adjust beam current and numerical aperture parameters without changing the physical structure, thereby maintaining simplicity while providing adaptability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enhances the flexibility in setting optimal resolution by varying beam current intensity and numerical aperture, allowing for high-resolution imaging without increasing the column height or requiring structural modifications, thus improving the overall imaging capabilities of multi-beam particle microscopes.
Implementation Method 1
a pre-multi-lens array, wherein the pre-multi-lens array has a pre-counter electrode with a central opening, through which the beam of charged particles passes
Implementation Method 2
a multi-lens array, which is arranged in the beam path downstream of the pre-multi-lens array, wherein the multi-lens array has a multi-aperture plate with a multiplicity of openings
Implementation Method 3
a controller, which is configured to supply adjustable excitations to the condenser lens system and the pre-counter electrode
Data Source
AI summary
A particle beam system and, such as a multi-beam particle microscope, can have a current intensity of individual particle beams that is flexibly set over large value ranges without structural modifications. The particle beam system can include a condenser lens system, a pre-multi-lens array with a specific pre-counter electrode and a pre-multi-aperture plate, and a multi-lens array. The system can includes a controller to supply adjustable excitations to the condenser lens system and the pre-counter electrode so that the charged particles are incident on the pre-multi-aperture plate in telecentric manner.