Multi-Beam SEM Image Correction for Vibration Distortion
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Dynamic disturbances such as vibrations in scanning electron microscopes (SEMs) introduce distortion into images of integrated circuits, complicating defect detection and increasing hardware complexity when trying to correct these issues.
Innovation Solution
A multi-beam SEM system analyzes signal information from multiple beams to identify and correct distortions using coherent filtering, averaging power spectral densities, and applying filters to remove noise and distortions, allowing for real-time image correction without additional hardware.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If hardware mechanisms are used to damp vibrations or insulate the sample from dynamic disturbances, then image distortion is reduced, but device complexity and cost increase
Solution Approach 1:
The patent replaces mechanical vibration damping hardware with a software-based signal processing system. The controller analyzes signal information from multiple beams, identifies disturbances through spectral analysis, and corrects image distortion algorithmically, eliminating the need for additional mechanical isolation components.
Solution Approach 2:
The patent introduces signal information from multiple beams as an intermediary to detect and characterize vibrations. By analyzing the coherent filtering signals from multiple beams, the system can identify disturbance patterns and correct images without direct mechanical intervention.
2Manufacturing precision
If hardware mechanisms are used to damp vibrations, then image distortion is reduced, but manufacturing cost increases
Solution Approach 1:
The patent replaces expensive mechanical vibration isolation hardware with a software-based correction system using existing multi-beam signal information. This substitution eliminates additional hardware costs while achieving the same image quality improvement.
Solution Approach 2:
The system uses its own multi-beam signal information to detect and correct vibrations, making the correction capability inherent to the existing system rather than requiring separate hardware additions. The controller leverages available signal data to perform self-diagnosis and self-correction.
3Measurement precision
If multiple beams are used for scanning, then image accuracy can be improved through analysis, but processing complexity increases
Solution Approach 1:
The patent implements feedback by using signal information from multiple beams to identify disturbances and apply corrections to the final image. The controller continuously analyzes the coherent filtering signals and adjusts the image reconstruction process based on detected vibration patterns, creating a closed-loop correction system.
Solution Approach 2:
The patent makes the multi-beam signal information serve multiple functions: it is used for both primary image formation and for vibration detection/characterization. This multi-functional use of the same signal data eliminates the need for separate sensor systems and reduces overall processing complexity.
Data Source
AI summary
Embodiments consistent with the disclosure herein include methods for image enhancement for a multi-beam charged-particle inspection system. Systems and methods consistent with the present disclosure include analyzing signal information representative of first and second images, wherein the first image is associated with a first beam of a set of beams and the second image is associated with a second beam of the set of beams; detecting, based on the analysis, disturbances in positioning of the first and second beams in relation to a sample; obtaining an image of the sample using the signal information of the first and second beams; and correcting the image of the sample using the identified disturbances.