Multi-Beamlet Electrode Array for Analog Beam Trajectory Control
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Solution Overview
Problem
Current charged particle multi-beamlet systems lack the ability to individually manipulate and adjust the trajectory of each beamlet, relying on digital on/off switching and lacking precise control for alignment and focusing, which limits their accuracy and throughput in applications like lithography and microscopy.
Innovation Solution
A manipulator device with individually adjustable electrodes and an electronic control circuit that provides analog voltage control, allowing for precise manipulation of each beamlet's trajectory, alignment, and focusing, using MEMS technology to fabricate the manipulators and reduce the need for external control wires.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If digital on/off switching of individual beamlets is used, then device complexity is reduced and ease of operation is improved, but manufacturing precision and trajectory control accuracy deteriorate
Solution Approach 1:
The patent applies parameter changes by transitioning from binary digital on/off control to continuous analog voltage control of the electrodes. Each electrode receives a specific analog voltage value that precisely adjusts the electrostatic field strength, enabling continuous trajectory control of beamlets rather than simple on/off switching. This resolves the contradiction by maintaining ease of digital operation while achieving high precision through analog parameter modulation.
Solution Approach 2:
The patent implements dynamics by making the electrode voltages adjustable and dynamic rather than fixed. The electronic control circuit can dynamically change the voltage levels applied to each electrode, allowing real-time adjustment of beamlet trajectories. This dynamic control capability enables both easy operation through programmable control and high precision through continuous parameter adjustment.
2Manufacturing precision
If individually adjustable voltage control is provided for each electrode, then manufacturing precision and trajectory control are improved, but device complexity increases
Solution Approach 1:
The patent applies merging by integrating the electronic control circuit directly into the manipulator device substrate. The control circuit, electrodes, and beamlet manipulation functions are combined in a single integrated structure, reducing overall device complexity despite the added functionality of individual electrode control. This integration allows high precision trajectory control without proportionally increasing system complexity.
Solution Approach 2:
The patent implements universality by designing the manipulator device to perform multiple functions through the same integrated structure. The electronic control circuit serves both to control beamlet trajectories and to provide feedback for alignment correction. The electrodes serve both manipulation and sensing functions when combined with the feedback system, reducing the need for separate dedicated components and thereby managing device complexity.
3Manufacturing precision
If feedback systems are implemented for periodic alignment checking, then manufacturing precision is improved over time, but loss of time increases due to periodic adjustments
Solution Approach 1:
The patent directly applies feedback by implementing a feedback system that periodically checks beamlet alignment using sensors and automatically adjusts electrode voltages through the electronic control circuit. The sensor detects beamlet positions, the control circuit processes the feedback signal, and the electrodes apply corrective voltages to maintain alignment. This closed-loop feedback mechanism continuously corrects alignment drift, improving long-term precision while minimizing intervention time through automated control.
Solution Approach 2:
The patent implements self-service by enabling the system to automatically detect and correct its own alignment issues without external intervention. The feedback system with sensors and electronic control circuit allows the manipulator device to self-diagnose alignment drift and self-correct by adjusting electrode voltages autonomously. This self-service capability reduces the time loss associated with manual realignment and maintains high precision over extended operation periods.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables improved accuracy and throughput by allowing individual adjustment of each beamlet's trajectory, focusing, and astigmatism correction, reducing beam errors and maintaining alignment over time through feedback systems.
Implementation Method 1
By providing a voltage to the one or more electrodes of the manipulator device, an electrostatic field can be generated which field can be used for influencing and/or controlling the trajectory of the charged particle in a charged particle beamlet
Implementation Method 2
In use, the electrostatic lens is provided with a control voltage for focusing the charged particle beamlet
Data Source
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AI summary
The invention relates to a method and a device for manipulation of one or more charged particle beams of a plurality of charged particle beamlets in a charged particle multi-beamlet apparatus. The manipulator device comprises a planar substrate comprising an array of through openings in the plane of the substrate, each of these through openings is arranged for passing the at least one charged particle beamlet there through, wherein each of the through openings is provided with one or more electrodes arranged around the through opening, and a electronic control circuit for providing control signals to the one or more electrodes of each through opening, wherein the electronic control circuit is arranged for providing the one or more electrodes of each individual through opening with an at least substantially analog adjustable voltage.