Multi-Chamber MEMS for Conflicting Pressure Requirements

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

Micro-electromechanical sensors with different functions require distinct operating conditions and gas pressures to achieve optimal performance, posing a challenge in integrating multiple sensors into a single apparatus while maintaining sensing accuracy and preventing electrical component corrosion.

Innovation Solution

A hermetically sealed micro-electromechanical apparatus with multiple independent chambers, each with a distinct gas pressure, is designed to accommodate different sensing elements such as barometers and accelerometers, where the sensing unit is enclosed by a first hermetically sealed chamber and the second cover defines a second hermetically sealed chamber with a different gas pressure, allowing for simultaneous measurement of various physical quantities.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If multiple sensing elements with different functions are integrated into a single apparatus, then device integration and space utilization are improved, but different sensing elements cannot achieve optimal performance due to conflicting gas pressure requirements

Engineering Contradiction:

Improvedevice integrationVSAvoidsensing accuracy

Core Design Contradiction:

Adaptability or versatilityVSMeasurement precision

Solution Approach 1:

The apparatus is divided into multiple independent hermetically sealed chambers (first hermetically sealed chamber and second hermetically sealed chamber), each capable of maintaining different gas pressure conditions. This segmentation allows each sensing element to operate in its optimal gas pressure environment while being integrated within a single device structure.

Inventive Principle:

Principle #1Segmentation

2Reliability

If a vacuum hermetically sealed chamber is used to reduce air damping for gyroscope sensing elements, then vibration damping effect is improved, but sensing elements requiring air damping for accurate measurement cannot function properly

Engineering Contradiction:

Improvevibration damping controlVSAvoidsensing element compatibility

Core Design Contradiction:

ReliabilityVSAdaptability or versatility

Solution Approach 1:

The system separates different sensing elements into different hermetically sealed chambers with different gas pressure conditions. Gyroscopes requiring vacuum for vibration damping are placed in one chamber, while accelerometers requiring air damping are placed in another chamber, allowing each to function optimally without interference.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Different regions (chambers) of the apparatus are provided with different gas pressure conditions tailored to the specific requirements of each sensing element. Each chamber creates a localized environment optimized for its contained sensing element's operational needs.

Inventive Principle:

Principle #3Local quality

3Ease of manufacture

If sensing elements are exposed to moisture and chemical substances, then manufacturing and assembly are simplified, but electrical components suffer from corrosion

Engineering Contradiction:

Improveassembly simplicityVSAvoidelectrical component durability

Core Design Contradiction:

Ease of manufactureVSReliability

Solution Approach 1:

Hermetically sealed chambers serve as intermediary protective barriers between the external environment (moisture and chemical substances) and the internal electrical components. These chambers maintain a controlled internal atmosphere that protects sensitive electrical elements from corrosion while allowing the device to be manufactured and assembled in standard environments.

Inventive Principle:

Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design enables the integration of multiple micro-electromechanical sensors with different functions in a single apparatus, ensuring optimal performance by providing tailored operating conditions for each sensor and protecting electrical components from moisture and chemical corrosion.

Implementation Method 1

a gas pressure of the first hermetically sealed chamber is different from a gas pressure of the second hermetically sealed chamber

Methodology Applied

Scientific EffectGas pressure differentiation:

Implementation Method 2

protecting electrical components from moisture and chemical corrosion

Methodology Applied

Scientific EffectPhysical containment: Physical Containment

Data Source

PatentUS9586815B2Micro-electromechanical apparatus with multiple chambers and method for manufacturing the same

Publication Date: 2017.03.07 IND TECH RES INST

AI summary

A micro-electromechanical apparatus with multiple chambers and a method for manufacturing the same are provided, wherein various micro-electromechanical sensors are integrated into a single apparatus. For example, the micro-electromechanical apparatus in this disclosure may have two independent hermetically sealed chambers with different pressures, such that a micro-electromechanical barometer and a micro-electromechanical accelerometer can be operated in an optimal pressure circumstance.