Multichannel HEMT Plug Structure for Lower ON Resistance

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Solution Overview

Problem

Nitride-based multichannel high electron mobility transistors (HEMTs) require further improvement in ON resistance (RDS(ON)) to enhance their performance in high-power applications.

Innovation Solution

Incorporating electrically conducting plugs that traverse and form ohmic contacts with multiple conductive channels, including 2DEG current channels, to create alternative current routes and reduce ON resistance by coupling disrupted and non-disrupted channels, thereby enhancing the capacity to carry ON current.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If nitride-based multichannel HEMTs are used to achieve high breakdown voltage and low leakage current, then device reliability is improved, but ON resistance remains too high for optimal performance

Engineering Contradiction:
Improvebreakdown voltage and leakage currentVSAvoidON resistance
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The device is divided into multiple independent conductive channels (first channel, second channel, third channel) that can operate simultaneously. Each channel is separated by potential barriers, allowing the device to achieve high breakdown voltage while providing multiple parallel current paths to reduce overall ON resistance.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Multiple conductive channels are merged into a single device structure, combining their current-carrying capabilities. The parallel operation of multiple channels reduces the effective ON resistance while maintaining the high breakdown voltage characteristics of nitride-based materials.

Inventive Principle:
Principle #5Merging (Combining)

2Object-affected harmful factors

If multiple conductive channels are created to reduce ON resistance, then device complexity increases

Engineering Contradiction:
ImproveON resistanceVSAvoidchannel structure
Core Design Contradiction:
Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The gate electrode structure serves multiple functions: it controls the potential barriers between channels, modulates the conductive channels, and maintains the structural integrity of the multichannel device. This multi-functionality reduces the need for additional control elements that would increase device complexity.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The device utilizes changes in electrical parameters (potential barriers, carrier concentration, channel width) to control the operation of multiple channels. By adjusting these parameters through the gate voltage, the device can dynamically optimize performance without requiring complex physical reconfiguration.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The implementation of plugs in multichannel HEMTs significantly reduces the ON resistance and increases the maximum drain current, improving the overall performance and efficiency of the transistors.

Implementation Method 1

electrically conducting plugs that traverse and form ohmic contacts with multiple conductive channels

Methodology Applied
Scientific EffectOhmic contact: Conduction (electrical)

Implementation Method 2

The accumulated electrons form a relatively thin, sheet-like concentration of high mobility electrons characterized by a high saturation drift velocity, which is referred to as two dimensional electron gas (2DEG)

Methodology Applied
Scientific EffectTwo dimensional electron gas (2DEG): Conduction (electrical)

Implementation Method 3

Voltage relative to a common ground applied to the gate generates an electric field in the FET that controls the resistance of the channel to turn the transistor ON and OFF

Methodology Applied
Scientific EffectElectric field: Electric Field

Data Source

PatentUS11978792B2Multichannel transistor
Publication Date: 2024.05.07 VISIC TECH
  • US11978792B2 patent drawing
  • US11978792B2 patent drawing
  • US11978792B2 patent drawing

AI summary

A field effect transistor (FET) includes a plurality of substantially parallel conductive channels and at least one electrically conducting plug to travers and form an ohmic connection with at least two of the plurality of conductive channels.