Multichannel Showerhead Layout for Uniform Gas Delivery and Exhaust
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Solution Overview
Problem
Conventional processing chambers experience non-uniform delivery and evacuation of gases and substances due to radial flow components, leading to non-uniformity of features formed on substrates, which adversely affect device quality.
Innovation Solution
A multichannel showerhead design with gas outlet ports and exhaust inlet ports positioned on the same side of the substrate, allowing for normal (perpendicular) flow, minimizing radial flow and enhancing uniformity of substance concentration.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional showerhead design with separate delivery and exhaust ports on opposite sides is used, then gas delivery and evacuation can be performed, but radial flow components cause non-uniform substance distribution and non-uniform feature formation on substrates
Solution Approach 1:
The showerhead is segmented into multiple independent channels (first delivery channel, second delivery channel, first exhaust channel, second exhaust channel) with distinct functions. Each channel has dedicated inlet and outlet ports positioned on the same side, allowing separate control of gas delivery and evacuation paths to eliminate radial flow mixing and achieve uniform substance distribution across the substrate surface.
Solution Approach 2:
The design transitions from a conventional single-plane port arrangement to a three-dimensional channel network where delivery and exhaust ports are positioned on the same side but connected through vertically extending channels. This dimensional reorganization allows perpendicular flow paths that eliminate radial components while maintaining effective gas delivery and evacuation.
2Device complexity
If delivery and exhaust ports are positioned on opposite sides of the showerhead, then structural simplicity is maintained, but radial flow components arise causing non-uniform substance distribution
Solution Approach 1:
The showerhead structure is segmented into multiple independent channels with dedicated delivery and exhaust functions. This segmentation allows the ports to be positioned on the same side while maintaining structural organization through distinct channel pathways, resolving the conflict between structural simplicity and uniformity requirements.
Solution Approach 2:
The design uses vertical channel extensions from the showerhead face to route gases between same-side ports without requiring opposite-side positioning. This dimensional approach maintains port alignment on one side while providing sufficient flow path separation, achieving both structural simplicity and uniform distribution.
3Productivity
If radial flow components are present in the gas delivery system, then gas can be delivered through the chamber, but non-uniformity of agent delivery deteriorates product quality
Solution Approach 1:
Each channel is designed with localized flow characteristics optimized for its specific function. Delivery channels provide focused perpendicular flow for uniform substance distribution, while exhaust channels provide dedicated evacuation paths. This local optimization of flow quality eliminates radial components and ensures uniform agent delivery across the entire substrate surface.
Solution Approach 2:
The gas delivery system is segmented into multiple independent channels, each providing localized perpendicular flow. This segmentation eliminates the radial flow components that would arise from a single centralized delivery system, maintaining both delivery efficiency and uniformity across different regions of the substrate.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design significantly reduces non-uniformities in substance distribution and reaction by-products, resulting in high-quality manufacturing products by maintaining uniform concentrations over time.
Implementation Method 1
Each delivery channel includes one or more inlet ports through at least one of the first surface or the side surface and a plurality of outlet ports through the second surface
Implementation Method 2
The exhaust channel includes a plurality of exhaust inlet ports through the second surface, and one or more exhaust outlet ports through at least one of the first surface, the second surface, or the side surface
Implementation Method 3
The first gas interacts with a substrate located in the environment of the processing chamber
Implementation Method 4
enhancing uniformity of substance concentration
Data Source
AI summary
Disclosed embodiments include systems and techniques that deploy a gas showerhead having a first surface, a second surface, and a side surface. The gas showerhead includes one or more delivery channels, each delivery channel including one or more inlet ports through at least one of the first surface or the side surface, and a plurality of outlet ports through the second surface. The gas showerhead further includes an exhaust channel having a plurality of exhaust inlet ports through the second surface, and one or more exhaust outlet ports through at least one of the first surface, the second surface, or the side surface.