Multichannel Splitter Spool for Semiconductor Gas Lines
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Solution Overview
Problem
Conventional gas line systems in semiconductor process chambers fail to prevent condensation and particle generation due to insufficient heating, especially when larger amounts of oxygen (O2) are used, leading to suboptimal processing conditions.
Innovation Solution
A gas line system with a multichannel splitter spool design, where a first gas line with a larger diameter is coupled to smaller diameter second gas lines, all wrapped with a heater jacket, ensuring that the gases are heated to similar temperatures before merging, preventing condensation and particle defects.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If conventional heater jackets are used to heat gas lines, then the heating function is provided, but the heating is insufficient to prevent condensation when larger amounts of O2 are flowed
Solution Approach 1:
The gas line system is segmented into multiple channels (first gas line with larger diameter, multiple second gas lines with smaller diameters) within the spool. This segmentation increases the surface area to volume ratio, allowing the heater jacket to more effectively heat each individual gas line and prevent condensation when larger amounts of O2 are flowed.
Solution Approach 2:
The heater jacket is nested around the spool containing multiple gas lines. This nested configuration allows the heater jacket to simultaneously heat multiple gas lines (second gas lines, third gas line, and fourth gas line) at substantially similar temperatures, ensuring uniform heating and preventing condensation throughout the entire gas distribution system.
2Productivity
If larger amounts of O2 are flowed through the gas line, then better stress, refractive index, and higher deposition rate are achieved, but insufficient heating leads to condensation and particle generation
Solution Approach 1:
The heater jacket provides preliminary heating to the gas lines before the gases reach the process chamber. By heating the second gas lines, third gas line, and fourth gas line at substantially similar temperatures in advance, the system prevents condensation and particle generation that would otherwise occur when large amounts of O2 are flowed, thereby enabling higher deposition rates without harmful byproducts.
3Quantity of substance
If a single large diameter gas line is used, then the gas flow capacity is sufficient, but the heating efficiency is reduced leading to condensation
Solution Approach 1:
The single large diameter gas line is segmented into multiple smaller diameter gas lines (second gas lines) within the spool structure. This segmentation maintains the total gas flow capacity while significantly increasing the surface area to volume ratio, thereby improving heating efficiency and preventing condensation when large amounts of gas are flowed through the system.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system effectively heats gases to prevent condensation and particle generation, allowing for higher flow rates of O2 without defects, enhancing processing efficiency and deposition rates in semiconductor devices.
Implementation Method 1
a heater jacket surrounding the spool; wherein the first diameter is larger than the second diameter
Implementation Method 2
when the colder O2 gas meets the heated TEOS gas in the gas line, condensation occurs within the gas line
Data Source
AI summary
Embodiments described herein relate to gas line systems with a multichannel splitter spool. In these embodiments, the gas line systems will include a first gas line that is configured to supply a first gas. The first gas line is coupled to a multichannel splitter spool with a plurality of second gas lines into which the first gas flows. Each gas line of the plurality of second gas lines will have a smaller volume than the volume of the first gas line. The smaller second gas lines will be wrapped by a heater jacket. Due to the smaller volume of the second gas lines, when the first gas is flowed through the second gas lines, the heater jacket will sufficiently heat the first gas, eliminating the condensation induced particle defects that occur in conventional gas line systems when the first gas meets with a second gas in the gas line system.