Multidirectional MEMS Platform Using Stacked Bending Actuators

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Solution Overview

Problem

Existing MEMS-based bending actuators lack the capability to provide multidirectional movement, which is essential for applications like autofocus and image stabilizer systems, where horizontal, vertical, and tilting movements are required, and current technologies struggle to achieve these movements efficiently.

Innovation Solution

A platform with multiple actuation layers, each comprising frames and actuators that allow for movement in specific directions, with the actuators being nanoscopic electrostatic drive (NED) type, enabling in-plane and out-of-plane translations and tilting by connecting auxiliary frame structures to facilitate multidirectional movement.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If single-layer MEMS bending actuators are used, then the device structure is simple, but multidirectional movement capability is insufficient

Engineering Contradiction:

Improvemultidirectional movement capabilityVSAvoidplatform structure complexity

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The platform is divided into multiple independent actuation layers, each capable of movement in specific directions. The first actuation layer handles movement in a first direction while the second actuation layer handles movement in a second direction, allowing each layer to be optimized independently while collectively providing multidirectional capability

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The invention transitions from single-layer planar actuation to multi-layer three-dimensional actuation. By stacking actuation layers vertically and mechanically connecting them through auxiliary frame structures, the system achieves movement in multiple directions (in-plane and out-of-plane) that cannot be obtained from a single layer

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

2Adaptability or versatility

If multiple actuation layers are stacked to achieve multidirectional movement, then movement versatility is improved, but device complexity increases

Engineering Contradiction:

Improvemovement direction capabilityVSAvoidnumber of actuation layers

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

Each actuation layer is designed with universal functionality to provide movement in its specific direction, and the layers work together as an integrated system. The auxiliary frame structures serve multiple purposes: mechanical connection between layers, support for actuators, and enabling of coupled movement patterns

Inventive Principle:

Principle #6Universality (Multi-functionality)

Solution Approach 2:

Multiple actuation layers are mechanically merged through auxiliary frame structures, specifically connecting the fourth frame of the second actuation layer with the second frame of the first actuation layer. This merging allows the layers to function as a unified multidirectional platform while maintaining individual directional capabilities

Inventive Principle:

Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The platform achieves efficient multidirectional movement, allowing for horizontal, vertical, and tilting motions, enhancing the dynamic response and accessibility of objects like lenses, making it suitable for advanced applications such as autofocus and image stabilizer systems.

Implementation Method 1

the actuators being nanoscopic electrostatic drive (NED) type

Methodology Applied

Scientific EffectElectrostatic drive: Electrostatics

Implementation Method 2

MEMS-based bending actuators can be used for a variety of applications, such as quasi-static tilting mirrors

Methodology Applied

Scientific EffectBending actuator deformation: Deformation

Data Source

PatentUS11697584B2Multidirectional translating and tilting platform using bending actuators as active entity

Publication Date: 2023.07.11 FRAUNHOFER GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG EV

AI summary

A platform includes first and second actuation layers. The first actuation layer includes first and second frames and a plurality of actuators connected between the first frame and the second frame, wherein the plurality of actuators are adapted to move the first and second frames with respect to each other in a first direction. The second actuation layer includes third and fourth frames and a plurality of actuators connected between the third frame and the fourth frame, wherein the plurality of actuators are adapted to move the third frame and the fourth frame with respect to each other in a second direction, different from the first direction. Thereby, the fourth frame of the second actuation layer and the second frame of the first actuation layer are mechanically connected to each other, such that the second actuation layer experiences the movement in the first direction induced by the first actuation layer.