Multi-function Spectroscopic Device for Film Thickness and Refractive Index
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Solution Overview
Problem
Conventional devices for measuring film thickness, refractive index, and surface shape are independently structured, lacking an integrated system that can be selectively used according to the required measurement specifications, such as accuracy levels.
Innovation Solution
A multi-function spectroscopic device with a parallel light generation system, lenses, a beam splitter, inclined mirrors, and a diffraction grating, allowing for both perpendicular and oblique light incidence to measure film thickness, refractive index, and surface shape using an integrated optical system.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple independent measurement devices are used for film thickness, refractive index, and surface shape measurements, then measurement accuracy and functionality are improved, but device complexity and integration are worsened
Solution Approach 1:
The patent combines multiple independent measurement functions (film thickness measurement, refractive index measurement, and surface shape measurement) into a single integrated optical device. The device uses a unified optical path system with beam splitters to divide and redirect light for different measurement purposes, eliminating the need for separate measurement instruments and reducing overall system complexity while maintaining comprehensive measurement capabilities
Solution Approach 2:
The optical device is designed to perform multiple measurement functions simultaneously using a single integrated system. By incorporating adjustable beam splitters and configurable optical paths, the device can adaptively switch between different measurement modes (thickness, refractive index, surface shape) without requiring separate specialized equipment, thus achieving multi-functionality within a unified structure
2Adaptability or versatility
If a fixed optical path is used for light incidence, then device structure is simplified, but adaptability to different measurement specifications is reduced
Solution Approach 1:
The patent employs dynamic optical path switching mechanisms including movable beam splitters and adjustable mirrors that can change the light incidence angle and measurement mode in real-time. This dynamic configuration allows the device to adapt between perpendicular and oblique light incidence, and switch between different measurement functions, providing versatility without requiring multiple fixed optical systems
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables measurement of film thickness, surface shape, and refractive index using a desired method within an integrated optical system, providing flexibility and improved accuracy.
Implementation Method 1
a parallel light generation part configured to generate and emit parallel light
Implementation Method 2
a first lens installed in an emission direction of the parallel light emitted by the parallel light generation part and configured to focus the light in a center portion thereof with respect to a light axis of the parallel light
Implementation Method 3
a second lens disposed to face the first lens and configured to convert light which moves through a first focus of the first lens and is diffused into parallel light
Implementation Method 4
a reference mirror installed to face the second lens to reflect light which moves through the second lens
Implementation Method 5
a beam splitter installed between the first lens and the second lens and disposed to reflect some light which moves through the first lens in a direction intersecting a light axis of the first lens, and to transmit the remaining light toward the second lens
Implementation Method 6
a third lens configured to focus light which moves through the beam splitter onto a measurement object
Implementation Method 7
a fourth lens configured to focus light which is reflected by the measurement object and reversely moves through the third lens and the beam splitter
Implementation Method 8
a first light path switch configured to switch a light path so that light which is generated by the parallel light generation part, moves toward a region other than the first lens, does not move through the first lens, and is reflected by the beam splitter to move is obliquely incident on a surface of the measurement object
Implementation Method 9
a second light path switch configured to switch a light path of light which moves from the first light path switch, moves through the measurement object, and obliquely moves with respect to a light axis of the third lens to move in a direction parallel to the light axis of the third lens
Implementation Method 10
a diffraction grating obliquely disposed with respect to a light axis of the fifth lens and configured to diffract parallel light which moves through the fifth lens and split the parallel light
Data Source
AI summary
A multi-function spectroscopic device includes a first lens installed in an emission direction of parallel light and focusing the light in a center portion thereof, a second lens disposed to face the first lens and, a reference mirror installed to face the second lens, a beam splitter installed between the first lens and the second lens, a third lens focusing light which moves through the beam splitter onto a measurement object, a fourth lens focusing light which is reflected by the measurement object and reversely moves through the third lens and the beam splitter, a fifth lens converting light which is diffused through a second focus of the fourth lens into parallel light, and a diffraction grating obliquely disposed with respect to a light axis of the fifth lens and diffracting parallel light which moves through the fifth lens and split the parallel light.