Multilayer Coating Apparatus Vertical Transfer Storage
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Solution Overview
Problem
Existing coating and developing apparatuses face challenges in achieving high throughput while maintaining a small occupied area, as increasing the number of treatment modules leads to a larger interface block and increased floor space requirements.
Innovation Solution
The apparatus is designed with a treatment block that includes multilayered sub-blocks with transfer mechanisms in the up-down direction and a relay block that couples the treatment block and exposure apparatus, featuring pre-exposure storages and non-treatment units like treatment solution units and inspection modules, allowing for efficient substrate transfer and storage without increasing the apparatus's size.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the number of treatment modules is increased to achieve high throughput, then the productivity is improved, but the occupied area of the apparatus increases
Solution Approach 1:
The patent transitions from a planar arrangement of treatment modules to a three-dimensional multilayered structure. Treatment modules are stacked vertically across multiple layers, allowing numerous modules to be accommodated within a compact footprint. The transfer mechanism operates across these vertical layers, enabling substrate transport between modules without requiring additional horizontal space, thus achieving high throughput while maintaining a small occupied area.
2Productivity
If additional substrate mounting and storage modules are added to increase treatment capacity, then the productivity is improved, but the device complexity increases
Solution Approach 1:
The transfer mechanism is designed as a universal substrate transport system that serves multiple functions across different layers. It can transfer substrates between various treatment modules, pre-exposure storages, and post-exposure storages located on different vertical levels. This multi-functional transfer mechanism eliminates the need for separate dedicated transfer systems for each module type, thereby increasing treatment capacity while controlling device complexity.
Solution Approach 2:
The patent implements a nested structure where pre-exposure storages and post-exposure storages are integrated within the multilayered treatment block. These storages are positioned at specific layers and are accessible via the transfer mechanism, allowing them to be nested within the overall apparatus structure rather than adding external complexity. This nesting approach enables high treatment capacity while maintaining a compact and organized device architecture.
3Productivity
If pre-exposure storages are added along the width direction to increase substrate storage capacity, then the productivity is improved, but the occupied area increases
Solution Approach 1:
Instead of expanding substrate storage capacity horizontally along the width direction, the patent utilizes the vertical dimension by stacking pre-exposure storages across multiple layers. The transfer mechanism can access these storages from different vertical levels, enabling increased storage capacity without proportionally increasing the occupied area. This vertical stacking approach effectively decouples storage capacity from horizontal footprint.
Data Source
AI summary
An apparatus includes: a treatment block including treatment modules; and a relay block coupling the treatment block and an exposure apparatus in a width direction, and including a transfer-in/out mechanism for the exposure apparatus. In the treatment block being multilayered in an up-down direction, a transfer mechanism is provided in a transfer region extending in the width direction. In a layer, in the treatment block, at a position accessible from the transfer-in/out mechanism, a deliverer on which the substrate is mounted when the substrate is delivered between the blocks is provided at an end on the relay block side. Pre-exposure storages storing the substrate before the exposure are provided along the width direction in two regions between which the transfer region is interposed in a depth direction. A non-treatment unit is provided at a portion where the pre-exposure storages are not provided in the two regions.