Multilayer Conductive Structure With Noble-Gas Diffusion Barrier
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Multilayer structures face performance degradation due to diffusion of diffusing components from one layer to adjacent layers, which affects the overall functionality of the structure.
Innovation Solution
A multilayer structure is designed with a conducting layer and a conductive diffusion-prevention layer, where the latter includes at least one metal or metal oxide and a noble gas, with a specific ratio of noble gas atoms to main metal atoms to prevent diffusion.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional conducting layer is used adjacent to another layer, then conductivity is achieved, but diffusing components diffuse into adjacent layers causing performance degradation
Solution Approach 1:
The patent introduces a diffusion-prevention layer as an intermediary between the conducting layer and adjacent layers. This intermediate layer contains noble gas atoms that act as barriers to prevent diffusing components from migrating between layers, thereby maintaining performance stability while preserving conductivity through the conducting layer.
Solution Approach 2:
The patent creates a composite structure by combining a conducting layer with a diffusion-prevention layer containing noble gas atoms. This composite multilayer structure integrates the electrical conductivity function with the diffusion barrier function, solving both requirements simultaneously without compromising either performance aspect.
2Reliability
If a diffusion barrier layer is added to prevent component diffusion, then performance degradation is suppressed, but device complexity increases
Solution Approach 1:
The patent modifies the composition parameters of the diffusion-prevention layer by incorporating noble gas atoms at specific concentrations. By optimizing the noble gas content and distribution within the layer, the patent achieves effective diffusion prevention with a relatively simple layer structure, minimizing the increase in device complexity while maintaining high reliability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The incorporation of a noble gas in the conductive diffusion-prevention layer effectively suppresses the diffusion of diffusing components, thereby maintaining the performance and integrity of the multilayer structure.
Implementation Method 1
a conductive diffusion-prevention layer, provided so as to be adjacent to the conducting layer, including at least one metal or metal oxide so as to be conductive, and including a noble gas, the ratio of the number of atoms of which to the number of atoms of the main metal in the at least one metal or metal oxide being 0.40 or more
Data Source
Figure 1
Figure 2(a)~2(d)
Figure 3(a)~3(b)
AI summary
An object of the present invention is to provide a multilayer structure (1) capable of preventing or suppressing the diffusion of a diffusing component from a layer (12, 16) including said diffusing component to a layer (14, 17) adjacent to said layer (12, 16). A multilayer structure (1) wherein the multilayer structure (1) comprises: a conducting layer (12, 16) which is conductive and includes a diffusing component capable of diffusing into an adjacent layer (14, 17); and a conductive diffusion-prevention layer (14, 17), provided so as to be adjacent to the conducting layer (12, 16), including at least one metal or metal oxide, so as be conductive, and including a noble gas, the ratio of the number of atoms of which to the number of atoms of the main metal in the at least one metal or metal oxide being 0.40 or more.