Multilayer Display Electrodes for Defect-Free Insulating Deposition

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Solution Overview

Problem

Display devices face issues with thin-film defects in the insulating layers on electrodes, which can lead to performance degradation and manufacturing challenges.

Innovation Solution

The use of a display device structure with electrodes having a first metal layer of molybdenum and a second metal layer alloyed with aluminum, nickel, and lanthanum, both with specific thicknesses and taper angles, to prevent void or seam defects in the insulating layers, ensuring a smooth deposition and reducing the risk of chemical damage during the manufacturing process.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If a single-layer electrode structure is used, then the manufacturing process is simpler, but thin-film defects occur in the insulating layer deposited on the electrode

Engineering Contradiction:
Improveelectrode manufacturing simplicityVSAvoidinsulating layer deposition quality
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The electrode is divided into multiple layers (first electrode layer, second electrode layer, third electrode layer) with different materials and functions. The first layer provides mechanical strength, the second layer provides electrical conductivity, and the third layer prevents oxidation, thereby resolving the contradiction between manufacturing simplicity and deposition quality by segmenting the electrode structure.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The electrode uses a composite structure combining different materials (e.g., ITO, Mo, Al, Ni, La) in multiple layers. This composite material approach allows each layer to contribute its specific properties, improving the overall electrode performance and preventing insulating layer defects while maintaining manufacturing feasibility.

Inventive Principle:
Principle #40Composite materials

2Reliability

If the electrode thickness is increased to improve conductivity, then electrical performance improves, but the insulating layer deposition becomes non-uniform

Engineering Contradiction:
Improveelectrical conductivityVSAvoidinsulating layer uniformity
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The thick electrode is segmented into multiple thinner layers, each with optimized thickness for its specific function. This segmentation maintains overall electrical conductivity while ensuring that each individual layer has a thickness suitable for uniform insulating layer deposition, resolving the contradiction between conductivity and deposition uniformity.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The electrode structure parameters are optimized by distributing the total thickness across multiple layers with different material compositions. This parameter change allows the electrode to maintain high conductivity through material selection while keeping each layer's thickness within the optimal range for uniform insulating layer deposition.

Inventive Principle:
Principle #35Parameter changes

3Manufacturing precision

If a multi-layer electrode structure with different materials is used, then deposition uniformity and defect prevention improve, but the manufacturing process becomes more complex

Engineering Contradiction:
Improveinsulating layer deposition qualityVSAvoidelectrode structure complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The electrode is segmented into functional layers that can be deposited using standard sequential deposition processes. While the structure is multi-layered, the segmentation follows a systematic approach that integrates well with existing manufacturing workflows, minimizing the increase in process complexity.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The multi-layer composite electrode structure is designed to leverage standard deposition techniques for each material layer. The complexity is managed by optimizing the deposition sequence and material selection to work within existing manufacturing capabilities, balancing improved deposition quality with acceptable process complexity.

Inventive Principle:
Principle #40Composite materials

4Ease of manufacture

If the electrode has a large taper angle for easier patterning, then manufacturing ease improves, but voids and seams form in the insulating layer

Engineering Contradiction:
Improveelectrode patterning easeVSAvoidinsulating layer defect-free quality
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The electrode structure is segmented into multiple layers with progressively optimized taper angles. Each layer can have a different taper angle optimized for its specific function, allowing the overall structure to achieve both easy patterning and defect-free insulating layer deposition by distributing the taper angle requirement across layers.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enhances the uniformity of the insulating layer deposition, reduces defects, and prevents chemical damage to the electrodes, thereby improving the reliability and efficiency of the display device manufacturing process.

Implementation Method 1

a first electrode and a second electrode spaced from the first electrode, a first insulating layer on the first electrode and the second electrode

Methodology Applied
Scientific EffectPhysical Vapour Deposition: Physical Vapour Deposition

Data Source

PatentUS20240063356A1Display device
Publication Date: 2024.02.22 SAMSUNG DISPLAY CO LTD
  • US20240063356A1 patent drawing
  • US20240063356A1 patent drawing
  • US20240063356A1 patent drawing

AI summary

A display device includes: a first electrode and a second electrode spaced from the first electrode; a first insulating layer on the first electrode and the second electrode; a plurality of light emitting elements on the first insulating layer and on the first electrode and the second electrode; a first connection electrode on the first electrode and contacting the plurality of light emitting elements; and a second connection electrode on the second electrode and contacting the plurality of light emitting elements, wherein each of the first electrode and the second electrode includes a first metal layer and a second metal layer on the first metal layer and including a different material from the first metal layer, a thickness of the first metal layer is between 100 Å to 300 Å, and a thickness of each of the first electrode and the second electrode is 2600 Å or less.