Multilayer Electroactive Polymer Actuator with Nested Via Holes
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Solution Overview
Problem
Conventional ElectroActive Polymer (EAP) actuators require high driving voltages, limiting their application in devices operating on low voltages, such as mobile electronic devices, and suffer from performance degradation due to electro-migration and high electrical resistance.
Innovation Solution
A multilayer EAP actuator with an interconnection electrode structure featuring a plurality of non-actuating layers and a common electrode, where via holes with increasing diameters connect extension electrodes, and driving electrodes formed from aluminum-copper alloy to reduce electro-migration and enhance electrical connectivity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Force
If a high driving voltage is used to obtain high generative force and large displacement, then the actuator performance is improved, but the applicability to low voltage devices is deteriorated
Solution Approach 1:
The patent divides the actuator into multiple thin polymer layers (e.g., 5-20 layers) with alternating driving electrodes between them. Each layer contributes additively to the total displacement while operating at lower voltage, resolving the contradiction between achieving large displacement and maintaining low voltage compatibility.
Solution Approach 2:
The patent transitions from a single-layer planar structure to a multilayer stacked structure, adding the vertical dimension. This allows the actuator to achieve large total displacement through cumulative effect of multiple thin layers, enabling high performance at low operating voltages suitable for mobile devices.
2Device complexity
If a conventional single-layer EAP structure is used, then the structure is simple, but the displacement and generative force are limited
Solution Approach 1:
The patent segments the actuator into multiple thin polymer layers with driving electrodes interleaved between them. This segmentation allows each layer to contribute to the total displacement, achieving large generative force while maintaining relatively simple manufacturing processes and structure.
3Ease of manufacture
If extension electrodes are connected through conventional via holes, then the manufacturing is simple, but the electrical connectivity is insufficient
Solution Approach 1:
The patent implements a nested via hole structure where via holes are formed in multiple stages with increasing diameters, and common electrodes are formed within these nested via holes. This nested structure provides robust electrical connectivity between extension electrodes across multiple polymer layers while maintaining manufacturing feasibility.
Solution Approach 2:
The patent changes the via hole diameter parameter in a stepwise manner through multiple formation stages, with each subsequent via hole having a larger diameter than the previous one. This parameter change enables progressive electrical connectivity improvement while maintaining ease of manufacture through standard fabrication processes.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables improved electrical connectivity and prolonged driving performance at lower voltages, reducing the hillock effect and maintaining performance over time, suitable for applications like varifocal fluidic lenses in mobile devices.
Implementation Method 1
EAP generally refers to polymers whose shape is modified by electric stimulation
Implementation Method 2
driving electrodes formed from aluminum-copper alloy to reduce electro-migration and enhance electrical connectivity
Data Source
AI summary
A multilayer electroactive polymer actuator and a method of manufacturing the same. The multilayer electroactive polymer actuator is divided into an actuating area and a non-actuating area. A plurality of driving electrodes, each formed on a side of the respective polymer layer to correspond to the actuating area. A plurality of extension electrodes connected to the driving electrodes and a common electrode for vertically connecting the extension electrodes are formed to correspond to the non-actuating area. A via hole is formed through the plurality of non-actuating layers and has a diameter which increases in a stepwise manner upwards. The common electrode is formed in the via hole. The driving electrode includes an alloy of aluminum and copper. The extension electrode is formed of material having a small reactivity with respect to laser as compared to the reactivity of the polymer layer.