Multilayer EFEM Layout for Compact Substrate Transfer
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Solution Overview
Problem
Existing substrate transfer apparatuses in semiconductor and display processes require significant space, limiting productivity and increasing costs due to the need for additional hardware like elevators or escalators, which are prone to vibrations and particle generation.
Innovation Solution
A substrate transfer apparatus with a multi-layer EFEM that includes a first moving plate, a second moving plate, and an EFEM with rails and robots that allow for efficient substrate transport between layers without the need for additional hardware, thereby reducing space requirements and vulnerability to vibrations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If additional hardware like elevators or escalators are used for substrate transfer between layers, then substrate transfer capability is improved, but device complexity and space requirements increase
Solution Approach 1:
The patent implements substrate transfer between layers by moving the EFEM itself vertically between levels, rather than using elevators or escalators to move substrates horizontally. This dimensional approach allows direct access to multiple layers through vertical positioning of the EFEM, eliminating the need for complex intermediate transport hardware.
Solution Approach 2:
The EFEM is designed to perform multiple functions: it can transfer substrates between different layers, load/unload substrates from FOUPs, and interface with various processing chambers. By making the EFEM itself movable between layers, it becomes a universal transfer station that eliminates the need for dedicated elevator systems for each substrate type or destination.
2Adaptability or versatility
If additional hardware like elevators or escalators are used for substrate transfer, then substrate transfer capability is improved, but area occupied by equipment increases
Solution Approach 1:
The invention utilizes the vertical dimension for EFEM movement between layers, converting what would be horizontal space requirements for elevators and escalators into vertical positioning capability. This allows the same substrate transfer function to be achieved with a compact footprint, as the EFEM moves up and down rather than requiring horizontal transport paths.
Solution Approach 2:
The patent combines the substrate transfer function with the EFEM's existing loading and processing capabilities into a single integrated unit. By making the EFEM itself the moving element rather than adding separate transport hardware, the design merges multiple functions into one compact system that occupies less total space.
3Adaptability or versatility
If elevators or escalators are used for substrate transfer, then multi-layer access is improved, but vulnerability to vibrations and particle generation increases
Solution Approach 1:
The patent extracts the harmful vibration and particle generation characteristics from the substrate transfer system by eliminating elevators and escalators. Instead of using mechanical transport devices that inherently produce vibrations and particles, the invention uses a cleaner EFEM positioning approach that moves the transfer station itself rather than transporting substrates through vibrating mechanisms.
Solution Approach 2:
The invention replaces the mechanical elevator/escalator system with a positioning system that moves the EFEM between layers. This substitution eliminates the need for continuous mechanical engagement and disengagement of substrate carriers, reducing vibration and particle generation associated with traditional mechanical transport systems.
Data Source
AI summary
Disclosed is a substrate transfer apparatus including a first moving plate, a second moving plate located at a lower portion of the first moving plate, and an EFEM including a first rail, a first moving body that is moved on the first rail, and a first robot connected to the moving body and that transports a substrate, and connected to the first moving plate and the second moving plate and that provides the substrate to the first moving plate or the second moving plate.