Multilayer Electrode Diffusion Barrier for High-Temperature Adhesion

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Solution Overview

Problem

Existing strain resistance films with electrode layers experience a reduction in adhesive force to wiring when exposed to high temperature environments, despite maintaining excellent bondability at room temperature.

Innovation Solution

A multilayer electrode structure is introduced, comprising a contact layer, a diffusion prevention layer containing a transition element from the fifth or sixth period, and a mounting layer, which prevents element diffusion and maintains adhesion even at high temperatures.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If a multilayer electrode is used on a Cr-Al strain resistance film, then bondability at room temperature is excellent, but adhesive force to wiring is reduced when exposed to high temperature environment

Engineering Contradiction:
Improveadhesive force to wiringVSAvoidhigh temperature environment
Core Design Contradiction:
StrengthVSTemperature

Solution Approach 1:

The electrode structure is divided into multiple functional layers: a Cr-Al alloy layer for strain resistance, a diffusion prevention layer containing fifth or sixth period transition elements to block element migration at high temperatures, and a mounting layer for wiring connection. This segmentation allows each layer to perform its specific function, preventing the degradation of adhesive force in high temperature environments while maintaining room temperature bondability.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The diffusion prevention layer acts as an intermediary barrier between the Cr-Al strain resistance film and the mounting layer. It prevents interdiffusion of elements (such as Cr and Al) that would otherwise occur at high temperatures and cause adhesive force reduction. This intermediary layer maintains the integrity of the interface and preserves bonding strength under thermal stress.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Reliability

If element diffusion is allowed in the electrode structure, then manufacturing is simpler, but performance deterioration occurs after high temperature exposure

Engineering Contradiction:
Improveperformance stability after high temperature exposureVSAvoidmultilayer electrode structure
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The electrode is segmented into distinct layers with specific compositions and functions. The diffusion prevention layer containing fifth or sixth period transition elements (such as Mo, W, Pt, Pd) is inserted between the Cr-Al strain resistance film and the mounting layer. This segmentation prevents element diffusion that would lead to performance deterioration, while the modular structure allows for optimized manufacturing processes for each layer.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The electrode structure employs composite materials with different properties: the Cr-Al alloy layer provides strain resistance, the diffusion prevention layer contains transition elements with high thermal stability and low diffusivity to prevent element migration, and the mounting layer provides electrical connection. This composite structure achieves both reliability under high temperature and manufacturability through established thin-film deposition techniques.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The multilayer electrode structure ensures excellent adhesive force to wiring and prevents performance deterioration of the strain resistance film, even after exposure to high temperature environments, by suppressing interdiffusion and maintaining electrical properties.

Implementation Method 1

a diffusion prevention layer superposed on the contact layer... in which the diffusion prevention layer contains a transition element belonging to the fifth or sixth period

Methodology Applied
Scientific EffectDiffusion prevention: Diffusion Barrier

Data Source

PatentUS20240255371A1Multilayer electrode, strain resistance film with electrode, and pressure sensor
Publication Date: 2024.08.01 TDK CORP
  • US20240255371A1 patent drawing
  • US20240255371A1 patent drawing
  • US20240255371A1 patent drawing

AI summary

There is provided a multilayer electrode including a contact layer capable of being superposed on a strain resistance film; a diffusion prevention layer superposed on the contact layer; and a mounting layer superposed on the diffusion prevention layer, in which the diffusion prevention layer contains a transition element belonging to the fifth or sixth periods.