Multilayer Film X-ray Microscope Mirrors for High Numerical Aperture
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Solution Overview
Problem
Conventional imaging type X-ray microscopes face challenges in achieving high numerical aperture and efficient imaging with high-energy X-rays, particularly in laboratory settings, due to reduced diffraction efficiency and low numerical aperture.
Innovation Solution
The design incorporates a multilayer film on mirrors within the X-ray microscope, allowing for high reflectivity and increased numerical aperture by maintaining a high X-ray incident angle, along with a Wolter type mirror set and a high-brightness X-ray source to achieve high-resolution and high-intensity imaging.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If Fresnel zone plate lens is used for high-energy X-rays, then the X-ray microscope can be constructed, but the diffraction efficiency is significantly reduced and numerical aperture is low
Solution Approach 1:
The patent changes the optical principle from diffraction-based FZP to reflection-based mirrors with multilayer films. This parameter change in the imaging mechanism enables high reflectivity for high-energy X-rays, achieving both high efficiency and high numerical aperture that were mutually exclusive with conventional FZP
Solution Approach 2:
The patent employs composite multilayer film structures on mirror surfaces, combining multiple materials with different X-ray reflectivity properties. This composite approach creates constructive interference for specific X-ray wavelengths, achieving high reflectivity and enabling efficient high-energy X-ray imaging with large numerical aperture
2Measurement precision
If KB mirror with total reflection is used, then the numerical aperture can be increased, but the angle of incidence must be limited below the critical angle requiring larger device size
Solution Approach 1:
The patent changes the reflection mechanism from total external reflection (critical angle limited) to Bragg reflection from multilayer films. This enables high reflectivity at large incident angles, allowing compact device design with large numerical aperture and high-energy X-ray capability
Solution Approach 2:
The patent employs Wolter-type nested mirror systems with specific elliptical and parabolic curvatures. This curved mirror geometry focuses high-energy X-rays efficiently at large angles while maintaining a compact laboratory-scale device size, achieving both large numerical aperture and small footprint
3Illumination intensity
If high-power microfocal X-ray source is used, then the X-ray luminance is increased, but the focal spot size must be controlled to maintain resolution
Solution Approach 1:
The patent uses advanced microfocal X-ray source technology that achieves high power output (500W-1kW) with extremely small focal spot sizes (50μm or less). This parameter achievement in source design provides high luminance while maintaining the spatial resolution required for microscopy
Solution Approach 2:
The patent employs curved condenser mirrors with specific elliptical geometry to focus high-power X-rays from the microfocal source. This curved focusing mechanism concentrates X-ray luminance onto the sample while maintaining a small irradiation spot size, achieving both high intensity and high spatial resolution
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables the acquisition of high-resolution, high-intensity images with enlarged numerical aperture, even with high-energy X-rays, suitable for laboratory use and applications such as semiconductor inspection and life sciences research.
Implementation Method 1
each mirror constituting the condenser and the imaging lens has a reflecting surface formed by a multilayer film having a high reflectivity in X-rays of a specific wavelength
Implementation Method 2
a condenser mirror for focusing and irradiating the emitted X-rays toward a sample
Implementation Method 3
a reflecting mirror type X-ray lens unit for imaging X-rays transmitted through the sample
Data Source
AI summary
An imaging type X-ray microscope capable of enlarging a numerical aperture even with high energy X-rays and acquiring a magnified image with sufficient intensity even in a laboratory. The imaging type X-ray microscope comprises an X-ray irradiation unit having a microfocal and high-power X-ray source and a condenser mirror for focusing and irradiating the emitted X-rays toward a sample, a sample holding unit for holding the sample, a reflecting mirror type X-ray lens unit for imaging X-rays transmitted through the sample, and an imaging unit for acquiring the imaged X-ray image, wherein each mirror constituting the condenser mirror and the reflecting mirror type X-ray lens unit has a reflecting surface formed with a multilayer film having a high reflectivity in X-rays of a specific wavelength.