Multi-layer Glass Core Substrate for IC Packaging

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Solution Overview

Problem

Current integrated circuit substrates face challenges in providing a reliable and efficient mechanical and electrical interface between IC dies and next-level components due to material limitations, such as warpage and mismatched thermal expansion coefficients, which affect the reliability and I/O capability of the packages.

Innovation Solution

A substrate with a multi-layer glass core is developed, where discrete glass layers are bonded together with adhesive or diffusion bonding, and conductive materials are deposited through holes to form conductors, enabling efficient electrical routing and mechanical support.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If a single-layer substrate is used, then the manufacturing process is simple, but thermal expansion mismatch and warpage occur

Engineering Contradiction:
Improvesubstrate manufacturing simplicityVSAvoidthermal expansion mismatch and warpage
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent applies composite materials by bonding multiple glass layers with different thermal expansion coefficients to create a multi-layer glass core substrate. This composite structure compensates for thermal expansion mismatch with silicon dies while reducing warpage, resolving the contradiction between manufacturing simplicity and reliability.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The substrate is segmented into multiple discrete glass layers that can be independently selected and bonded together. Each layer serves a specific function in managing thermal expansion and mechanical properties, allowing the substrate to be optimized for reliability while maintaining manufacturability through modular assembly.

Inventive Principle:
Principle #1Segmentation

2Reliability

If multi-layer glass core is used, then thermal expansion mismatch and warpage are reduced, but manufacturing complexity increases

Engineering Contradiction:
Improvethermal expansion mismatch and warpage reductionVSAvoidsubstrate structure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The multi-layer glass core uses composite materials with each layer having specific thermal expansion properties. The bonding of these layers creates a structured composite that manages thermal and mechanical stresses, achieving reliability improvement while the structured approach keeps manufacturing complexity manageable.

Inventive Principle:
Principle #40Composite materials

3Ease of manufacture

If conventional substrate materials are used, then manufacturing is easier, but I/O density and reliability are limited

Engineering Contradiction:
Improvemanufacturing easeVSAvoidI/O capability and reliability
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent replaces conventional single-material substrates with multi-layer glass core composites. This composite structure provides superior thermal matching and mechanical stability, enabling higher I/O density and reliability while maintaining manufacturing feasibility through established bonding processes.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The multi-layer glass core substrate reduces thermal expansion mismatch and warpage, allowing for higher I/O density and reliability by providing a stable and efficient mechanical and electrical interface between IC dies and next-level components.

Implementation Method 1

discrete glass layers are bonded together with adhesive or diffusion bonding

Methodology Applied
Scientific EffectAdhesive bonding: Adhesive

Implementation Method 2

discrete glass layers are bonded together with adhesive or diffusion bonding

Methodology Applied
Scientific EffectDiffusion bonding: Diffusion Welding

Implementation Method 3

conductive materials are deposited through holes to form conductors

Methodology Applied
Scientific EffectPhysical vapor deposition: Physical Vapour Deposition

Data Source

PatentUS9761514B2Substrate for integrated circuit devices including multi-layer glass core and methods of making the same
Publication Date: 2017.09.12 INTEL CORP
  • US9761514B2 patent drawing
  • US9761514B2 patent drawing
  • US9761514B2 patent drawing

AI summary

Disclosed are embodiments of a substrate for an integrated circuit (IC) device. The substrate includes a core comprised of two or more discrete glass layers that have been bonded together. A separate bonding layer may be disposed between adjacent glass layers to couple these layers together. The substrate may also include build-up structures on opposing sides of the multi-layer glass core, or perhaps on one side of the core. Electrically conductive terminals may be formed on both sides of the substrate, and an IC die may be coupled with the terminals on one side of the substrate. The terminals on the opposing side may be coupled with a next-level component, such as a circuit board. One or more conductors extend through the multi-layer glass core, and one or more of the conductors may be electrically coupled with the build-up structures disposed over the core. Other embodiments are described and claimed.