Multilayer Graphene Doping for Sharp pn Junction Boundaries

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Solution Overview

Problem

Existing methods struggle to form graphene with good semiconductor characteristics, particularly in creating a pn junction with well-defined boundaries and defect-free edges, limiting its application in electronic devices.

Innovation Solution

A method for forming multilayer graphene involving controlled temperature and gas doping processes to create p-type and n-type layers with precise junctions and defect-free edges, using nitrogen-containing hydrocarbon compounds like pyridine to achieve bilayer or multilayer structures with tunable bandgaps.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If existing methods are used to form graphene, then graphene can be produced, but it is difficult to form graphene with good semiconductor characteristics and well-defined pn junction boundaries

Engineering Contradiction:
Improvepn junction boundary definitionVSAvoidsemiconductor characteristics
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

The invention segments the graphene formation process into distinct zones with different temperatures. A first region is formed at a first temperature to create a first type of doped graphene, while a second region is formed at a second temperature to create a second type of doped graphene. This spatial segmentation enables well-defined pn junction boundaries with good semiconductor characteristics.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention applies local quality by creating different thermal environments in different regions of the substrate. The first region receives a first temperature that induces doping of a first type, while the second region receives a second temperature that induces doping of a second type. This local differentiation of thermal conditions produces the desired pn junction structure with sharp boundaries.

Inventive Principle:
Principle #3Local quality

2Quantity of substance

If higher temperature is used during graphene formation, then doping effect is enhanced, but edge defects may increase

Engineering Contradiction:
Improvedoping concentrationVSAvoidedge integrity
Core Design Contradiction:
Quantity of substanceVSManufacturing precision

Solution Approach 1:

The invention applies different temperature conditions to different regions: a higher first temperature is used in the first region to achieve strong doping effect, while a lower second temperature is used in the second region to maintain edge integrity and reduce defects. This local differentiation allows optimization of doping concentration without compromising overall edge quality.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The substrate is segmented into a first region for high-temperature doping and a second region for low-temperature edge preservation. This spatial segmentation enables simultaneous optimization of doping concentration in the bulk and edge integrity at the boundaries.

Inventive Principle:
Principle #1Segmentation

3Reliability

If multilayer graphene is formed to achieve tunable bandgaps, then semiconductor characteristics improve, but process complexity increases

Engineering Contradiction:
Improvesemiconductor characteristicsVSAvoidprocess complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The invention merges the doping process and multilayer formation into a single integrated process. By forming multiple layers at different temperatures in different regions, the method simultaneously achieves doping, layer multiplication, and pn junction creation, thereby improving semiconductor characteristics without proportionally increasing process complexity.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The invention utilizes parameter changes in temperature to control both the number of layers formed and the doping type in each region. By varying the temperature parameter across different regions, the process achieves multilayer formation with tunable bandgaps and desired semiconductor characteristics while maintaining process efficiency.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The method enables the formation of multilayer graphene with improved pn junction characteristics and defect-free edges, facilitating the production of high-performance electronic devices such as transistors and diodes with precise control over junction widths and edge integrity.

Implementation Method 1

forming a first graphene on the underlayer by using a first source gas at a first temperature; forming a first multilayer graphene on a first area of the first graphene by using a second source gas at a second temperature

Methodology Applied
Scientific EffectChemical vapor deposition: Chemical Vapour Deposition

Implementation Method 2

the n-type multilayer graphene is formed due to an n-type dopant included in the first or second source gas

Methodology Applied
Scientific EffectAdsorption: Adsorption

Data Source

PatentEP3181516B1Method of forming multilayer graphene, device including the multilayer graphene, and method of manufacturing the device
Publication Date: 2025.06.25 SAMSUNG ELECTRONICS CO LTD
  • EP3181516B1 patent drawingFigure 1A~1C
  • EP3181516B1 patent drawingFigure 1D~1F
  • EP3181516B1 patent drawingFigure 2~3

AI summary

A multilayer graphene, a method of forming the same, a device including the multilayer graphene, and a method of manufacturing the device are provided. In the method of forming the multilayer graphene, a first graphene is formed on an underlayer, and then a multilayer graphene is formed on a first area of the first graphene at a first temperature by using a first source gas, the multilayer graphene comprising a portion of the first graphene corresponding to the first area, wherein a temperature used to form the first graphene is different from the first temperature, or a source gas used to form the first graphene is different from the first source gas.