Multilayer Grating Coupler Structure for Wide-Band Optical Coupling

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Solution Overview

Problem

Traditional single layer grating couplers exhibit poor coupling efficiency, limited bandwidth, and are susceptible to interference and attenuation as semiconductor chips shrink in size and density increases.

Innovation Solution

Implementing a multilayer grating structure with independently designed grating layers having different refractive indices and geometric dimensions to optimize light guidance and reduce energy loss, increasing coupling efficiency and bandwidth while minimizing interference.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If traditional single layer grating couplers are used, then the structure is simple and easy to manufacture, but the coupling efficiency is poor and bandwidth is limited

Engineering Contradiction:
Improvecoupling efficiencyVSAvoidgrating structure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The grating coupler is divided into multiple independent grating layers, each with its own grating structure. The first grating layer includes first grating features, and the second grating layer includes second grating features. This segmentation allows each layer to independently contribute to light coupling, thereby improving overall coupling efficiency and bandwidth while managing complexity through modular design

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention transitions from a single-layer (2D) grating structure to a multi-layer (3D) grating structure by adding vertical stacking of grating layers. This dimensional change enables light to be coupled through multiple interfaces and paths, significantly enhancing coupling efficiency and bandwidth without sacrificing manufacturability

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Reliability

If single layer grating couplers are used, then manufacturing is easier, but the device is susceptible to interference and attenuation

Engineering Contradiction:
Improveanti-interference capabilityVSAvoidgrating structure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The grating coupler is divided into multiple independent grating layers, each with its own grating structure. The first grating layer includes first grating features, and the second grating layer includes second grating features. This segmentation allows each layer to independently contribute to light coupling, thereby improving overall coupling efficiency and bandwidth while managing complexity through modular design

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention employs multiple grating layers with different materials and refractive indices. The first grating layer and second grating layer are formed with different material compositions, creating a composite structure that reduces interference and attenuation through material diversity while maintaining manufacturing feasibility

Inventive Principle:
Principle #40Composite materials

3Productivity

If semiconductor chips are scaled down to increase density, then production efficiency increases and costs decrease, but optical coupling performance deteriorates

Engineering Contradiction:
Improveproduction efficiencyVSAvoidoptical coupling efficiency
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

The invention transitions from a single-layer (2D) grating structure to a multi-layer (3D) grating structure by adding vertical stacking of grating layers. This dimensional change enables light to be coupled through multiple interfaces and paths, significantly enhancing coupling efficiency and bandwidth without sacrificing manufacturability

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The invention employs multiple grating layers with different materials and refractive indices. The first grating layer and second grating layer are formed with different material compositions, creating a composite structure that reduces interference and attenuation through material diversity while maintaining manufacturing feasibility

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The multilayer grating couplers achieve high coupling efficiency, wide bandwidth, and improved stability, making them suitable for silicon photonics applications and convenient for wafer-scale testing and low-cost packaging.

Implementation Method 1

Light coupled from one end of the optical gratings that has been traveling transversely through the optical gratings by reflecting off the inner surfaces at shallow angles may be redirected so that it strikes the inner surfaces at a sharper angle that is greater than the critical angle of incidence

Methodology Applied
Scientific EffectTotal internal reflection: Total Internal Reflection

Implementation Method 2

redirected so that it strikes the inner surfaces at a sharper angle that is greater than the critical angle of incidence, thus allowing the redirected light to escape from the other end of the optical gratings

Methodology Applied
Scientific EffectRefraction: Refraction

Data Source

PatentUS20250355189A1Multilayer structure for optical coupling and fabrication method thereof
Publication Date: 2025.11.20 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US20250355189A1 patent drawing
  • US20250355189A1 patent drawing
  • US20250355189A1 patent drawing

AI summary

An apparatus for optical coupling according to the present disclosure includes a semiconductor substrate, a reflective layer disposed on the semiconductor substrate, a lower grating layer above the reflective layer, the lower grating layer including a base layer and a lower grating coupler above the base layer, grating teeth of the lower grating coupler facing the semiconductor substrate, and an upper grating layer above the lower grating layer, the upper grating layer including an upper grating coupler and a coating layer above the upper grating coupler, grating teeth of the upper grating layer facing away from the semiconductor substrate.