Deposition Mask Multilayer Frame for Warpage-Resistant Adhesion
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Solution Overview
Problem
Wearable devices such as HMDs and AR glasses require high-resolution displays with at least 2,000 PPI, but existing deposition masks suffer from warpage issues that affect adhesion, hindering the fabrication of high-quality display panels.
Innovation Solution
A deposition mask design with a mask substrate, membrane, and frame structure that includes multiple inorganic layers, where the layers are patterned to align with the mask substrate edge, enhancing adhesion and addressing warpage issues.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a conventional deposition mask is used for high-resolution display fabrication, then the display resolution can be achieved, but warpage of the mask inorganic layer occurs causing poor adhesion
Solution Approach 1:
The mask inorganic layer is segmented into multiple distinct layers (first mask inorganic layer and second mask inorganic layer) with different materials and functions. The first layer provides stress compensation while the second layer provides adhesion, preventing warpage and improving overall reliability without compromising manufacturing precision.
Solution Approach 2:
The mask inorganic layer is formed as a composite structure using different inorganic materials (e.g., silicon oxide and silicon nitride) with complementary properties. This composite approach allows simultaneous achievement of stress control and adhesion enhancement, resolving the contradiction between preventing warpage and maintaining strong bonding.
2Strength
If the mask inorganic layer is made thick to improve adhesion, then bonding strength increases, but warpage occurs affecting fabrication quality
Solution Approach 1:
The thick mask inorganic layer is divided into multiple thinner sub-layers with different materials. This segmentation reduces warpage in each individual layer while collectively providing the necessary adhesion strength, maintaining both bonding strength and fabrication quality.
Solution Approach 2:
The stress characteristics of the mask inorganic layer are modified by changing material composition and layer thickness parameters. By adjusting these parameters, the layer provides adhesion strength without excessive warpage, resolving the contradiction between strength and precision.
3Device complexity
If a single-layer mask inorganic structure is used, then the device complexity is low, but warpage occurs reducing adhesion reliability
Solution Approach 1:
The mask inorganic layer is segmented into multiple functional layers, each with specific roles. While this increases structural complexity, it significantly improves adhesion reliability by preventing warpage, making the trade-off worthwhile for high-resolution display fabrication.
Solution Approach 2:
A composite multi-layer inorganic structure is implemented where different materials provide different functions. This composite approach enhances adhesion reliability through stress compensation and adhesion promotion, justifying the increased device complexity.
Data Source
AI summary
There is provided a deposition mask. The deposition mask includes a mask substrate comprising a plurality of cell areas and a cell peripheral area surrounding the plurality of cell areas; a mask membrane overlapping with the cell areas of the mask substrate; and a mask frame overlapping with the cell peripheral area of the mask substrate, wherein the mask membrane comprises a mask shadow defining a pixel opening, wherein the mask frame comprises a first mask inorganic layer on the mask substrate, and a second mask inorganic layer on the first mask inorganic layer, and wherein the first mask inorganic layer and the second mask inorganic layer are formed in a certain pattern up to an edge of the mask substrate.