Multi-Layer Mask Assembly for Shadow-Free Deposition

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Existing mask assemblies fail to prevent the shadow phenomenon of the deposition material, which leads to the deposition material, which affects the deposition quality of the deposition material, which affects the deposition material, which affects the deposition quality of the deposition material, which affects the deposition quality of the deposition material, which affects the deposition quality of the deposition material.

Innovation Solution

A mask assembly with a body unit and a sheet unit comprising films with specific material compositions and configurations to enhance deposition quality by preventing shadow phenomena.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If a conventional mask assembly with a single-layer mask sheet is used, then the device complexity is low, but shadow phenomenon occurs during deposition which degrades deposition quality

Engineering Contradiction:
Improvedeposition qualityVSAvoidmask assembly structure
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The mask sheet is divided into multiple functional layers (first mask layer, second mask layer, third mask layer) with different materials and properties. Each layer serves a specific purpose: the first mask layer provides structural support, the second mask layer controls deposition patterns, and the third mask layer prevents shadow phenomenon. This segmentation allows the mask assembly to achieve high deposition quality while managing complexity through functional specialization.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The mask assembly uses composite material structure with different materials for each mask layer. The first mask layer uses a first material, the second mask layer uses a second material, and the third mask layer uses a third material. These composite materials provide complementary properties that collectively prevent shadow phenomenon and improve deposition quality, with each material optimized for its specific function within the multi-layer system.

Inventive Principle:
Principle #40Composite materials

2Manufacturing precision

If the mask sheet has uniform thickness throughout, then the manufacturing process is simple, but shadow phenomenon occurs due to uneven deposition material flow

Engineering Contradiction:
Improvedeposition uniformityVSAvoidmask sheet fabrication
Core Design Contradiction:
Manufacturing precisionVSEase of manufacture

Solution Approach 1:

The mask assembly implements local quality by having different thicknesses and materials at different locations and layers. The first mask layer, second mask layer, and third mask layer have distinct properties tailored to their specific positions and functions. This local differentiation ensures uniform deposition material flow through the mask assembly while maintaining manufacturing feasibility through standardized layer fabrication processes.

Inventive Principle:
Principle #3Local quality

3Manufacturing precision

If a single-layer mask sheet is used, then the ease of operation is high, but deposition quality deteriorates due to shadowing effects

Engineering Contradiction:
Improvedeposition qualityVSAvoidnumber of mask layers
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The mask sheet is segmented into three distinct mask layers, each with specific thickness and material properties. The first mask layer has a first thickness, the second mask layer has a second thickness, and the third mask layer has a third thickness. This segmentation enables precise control over deposition patterns and eliminates shadow phenomenon while maintaining operational efficiency through the coordinated function of each layer.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The mask assembly employs composite materials with different properties for each mask layer. The first material, second material, and third material are selected to provide complementary characteristics that collectively achieve uniform deposition and prevent shadowing. This composite structure improves deposition quality while the systematic arrangement of layers maintains ease of operation.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The mask assembly improves deposition quality by reducing shadowing effects, ensuring uniform and precise deposition of layers on the substrate.

Implementation Method 1

a first film and a second film, wherein the first film is disposed on the first surface of the body unit, and the second film is disposed on the first film and overlaps the first film

Methodology Applied
Scientific EffectPhysical vapor deposition: Physical Vapour Deposition

Implementation Method 2

a deposition material may be sprayed from a deposition source and may be deposited on a display substrate through a mask assembly

Methodology Applied
Scientific EffectDeposition: Deposition (physical)

Data Source

PatentUS20250376753A1Mask assembly and method of manufacturing mask assembly
Publication Date: 2025.12.11 SAMSUNG DISPLAY CO LTD
  • US20250376753A1 patent drawing
  • US20250376753A1 patent drawing
  • US20250376753A1 patent drawing

AI summary

Provided are a mask assembly and a method of manufacturing the mask assembly. The mask assembly includes a mask frame including an opening area, a body unit disposed which covers the mask frame and includes ribs that cross the opening area, intersect one another, and define a first opening, and a mask sheet disposed on a first surface of the body unit and having a sheet unit that defines a plurality of second openings overlapping the first opening. The sheet unit includes a first film disposed on the first surface of the body unit and a second film disposed on the first film to overlap the first film. A width of the first film between adjacent second openings from among the plurality of second openings is less than a width of the second film between the adjacent second openings.