Multilayer Mirror X-ray Optical System for Small Angle Resolution

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Solution Overview

Problem

In X-ray small angle optical systems, achieving high small angle resolution is challenging due to increased air scattering and background noise when the sample is fixed at the focal point, limiting the movement of the detector and making it difficult to cover the gap between the sample and detector with a vacuum pass, while also dealing with pseudo-focus regions caused by finite-size X-ray sources and imperfect crystals.

Innovation Solution

An X-ray small angle optical system is designed with a multilayer mirror having a specific mosaicity to create a pseudo-parallel beam region between the mirror and the focal point, allowing the sample to be positioned and moved within this region for improved angular resolution, and featuring a long focal length and improved processing accuracy to maintain a stable X-ray flux.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Illumination intensity

If the sample is fixed at the focal point to achieve strong X-ray flux, then the X-ray intensity at the sample position is improved, but the detector movement is limited and air scattering increases background noise

Engineering Contradiction:
ImproveX-ray flux at sampleVSAvoidsmall angle resolution
Core Design Contradiction:
Illumination intensityVSMeasurement precision

Solution Approach 1:

The patent introduces a vacuum pass as an intermediary medium between the sample and detector to replace air. This eliminates air scattering of X-rays, reducing background noise and improving the signal-to-noise ratio, thereby enabling better small angle resolution while maintaining the sample at the focal point for strong X-ray flux

Inventive Principle:
Principle #24Intermediary (Mediator)

2Measurement precision

If the gap between sample and detector is covered with vacuum pass, then background noise is reduced, but the detector becomes difficult to implement when it becomes large

Engineering Contradiction:
Improvesmall angle resolutionVSAvoiddetector implementation complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent creates a pseudo-parallel beam region by positioning the sample upstream of the focal point rather than at the focal point. This dimensional repositioning in the optical path allows the formation of a parallel beam region that extends the effective measurement range and accommodates larger detectors without requiring complex vacuum pass implementations

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Length of stationary object

If a multilayer mirror with improved processing accuracy is used, then the pseudo-parallel beam region is extended, but the manufacturing complexity increases

Engineering Contradiction:
Improvepseudo-parallel beam region lengthVSAvoidmultilayer mirror processing accuracy
Core Design Contradiction:
Length of stationary objectVSManufacturing precision

Solution Approach 1:

The patent optimizes specific parameters of the multilayer mirror including the mosaicity distribution (controlling the spread of crystal orientations), layer thickness, and focal length. By carefully controlling these parameters, the patent extends the pseudo-parallel beam region length while managing the manufacturing precision requirements through parameter optimization rather than requiring extreme precision across all dimensions

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enhances the achievable small angle resolution by minimizing beam size variations and increasing the measurement range, reducing background noise and improving the signal-to-noise ratio, while allowing for a larger detector implementation.

Implementation Method 1

a multilayer mirror 12 having an elliptical reflection surface... causing the X-rays to be reflected by the multi-layer mirror

Methodology Applied
Scientific EffectX-ray reflection: Reflection

Data Source

PatentEP3141889B1X-ray small angle optical system with multilayer mirror
Publication Date: 2022.03.16 RIGAKU CORP
  • EP3141889B1 patent drawingFigure 1
  • EP3141889B1 patent drawingFigure 2
  • EP3141889B1 patent drawingFigure 3

AI summary

Provided is an X-ray small angle optical system, which easily achieves a desired angular resolution, including: an X-ray source having a microfocus; a multilayer mirror having an elliptical reflection surface, and being configured to collect X-rays emitted from the X-ray source and to irradiate a sample; and an X-ray detector configured to detect scattered X-rays generated from the sample, in which the elliptical reflection surface of the multilayer mirror has a focal point A and a focal point B, in which the X-ray source is arranged such that the microfocus includes the focal point A, and in which the X-ray detector is arranged on the multilayer mirror side of the focal point B.