Multilayer Sealing Structure for Display Touch Defects

The thin film sealing layer is divided into multiple inorganic layers (first inorganic layer and second inorganic layer) with different hydrogen contents. The first inorganic layer has a higher hydrogen content to reduce stress, while the second inorganic layer has a lower hydrogen content to provide better sealing. This segmentation resolves the contradiction by improving manufacturing precision through layered structure while maintaining reasonable device complexity.

The patent uses composite inorganic layers with different material compositions and hydrogen contents. The first inorganic layer and second inorganic layer are made of different materials optimized for their specific functions (stress reduction and sealing respectively). This composite approach improves defect rate by combining the advantages of different materials in a multi-layer structure.

The patent segments the inorganic layer into two distinct layers with different hydrogen contents. The first inorganic layer has higher hydrogen content to reduce stress, while the second inorganic layer has lower hydrogen content to maintain low etch rate. This segmentation allows each layer to optimize its properties independently, resolving the contradiction between stress reduction and etch rate control.

Different regions of the thin film sealing layer are assigned different hydrogen contents based on their functional requirements. The first inorganic layer (closer to the touch electrode) has higher hydrogen content for stress reduction, while the second inorganic layer (outer layer) has lower hydrogen content for low etch rate. This local quality differentiation resolves the contradiction by applying appropriate properties to appropriate locations.