Multilayer Substrate for Dense Vertically Aligned Carbon Nanotube Arrays

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Solution Overview

Problem

Existing methods fail to produce dense and well-aligned carbon nanotube arrays on metal surfaces with strong adhesion, limiting their effectiveness as thermal interface materials due to catalyst migration and poor adhesion to the metal substrate.

Innovation Solution

A multilayer substrate comprising adhesion, interface, and catalytic layers deposited on an inert metal support, which prevents catalyst migration and enhances adhesion, allowing for the growth of dense, vertically aligned carbon nanotubes with strong bonding to the metal surface.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If a thin oxide film is incorporated to promote dense and aligned CNT growth, then CNT alignment and density are improved, but adhesion between the metal surface and CNT array deteriorates

Engineering Contradiction:
ImproveCNT alignment and densityVSAvoidadhesion between metal surface and CNT array
Core Design Contradiction:
Manufacturing precisionVSStrength

Solution Approach 1:

The patent introduces an adhesion layer as an intermediary component between the metal support and the oxide film. This adhesion layer serves as a mediator that provides strong bonding to the metal surface while allowing the oxide film to function as a catalyst support for CNT growth. The adhesion layer resolves the contradiction by decoupling the adhesion function from the catalyst support function, enabling both strong metal-CNT array adhesion and dense CNT alignment to coexist.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Quantity of substance

If catalyst particles are allowed to migrate during CNT growth, then CNT array density is reduced, but the process becomes simpler

Engineering Contradiction:
ImproveCNT array densityVSAvoidsubstrate structure complexity
Core Design Contradiction:
Quantity of substanceVSDevice complexity

Solution Approach 1:

The patent applies preliminary action by forming the adhesion layer and oxide film structure before CNT growth begins. This pre-formed structure prevents catalyst particle migration during the growth process by providing a stable substrate that anchors the catalyst particles in place. The adhesion layer is deposited first to ensure strong metal bonding, followed by the oxide film that will serve as the catalyst support, creating a stable configuration before the CNT growth process starts.

Inventive Principle:
Principle #10Preliminary action

3Quantity of substance

If a single-layer substrate is used, then the manufacturing process is simpler, but both CNT density and adhesion cannot be simultaneously optimized

Engineering Contradiction:
ImproveCNT densityVSAvoidsubstrate fabrication complexity
Core Design Contradiction:
Quantity of substanceVSEase of manufacture

Solution Approach 1:

The patent segments the substrate into distinct functional layers: an adhesion layer for metal bonding, an oxide film for catalyst support, and a metal layer for additional adhesion and structural support. Each layer is optimized for its specific function, allowing CNT density to be maximized through the oxide film's catalyst support properties while adhesion is maximized through the adhesion layer's strong metal bonding. This segmentation enables simultaneous optimization of both CNT density and adhesion, overcoming the limitations of a single-layer substrate.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The multilayer substrate approach results in carbon nanotube arrays with high density and strong adhesion, maintaining integrity even when immersed in solvents and enhancing thermal conductivity by minimizing thermal transfer losses.

Implementation Method 1

The adhesion layer is formed of a material that improves the adhesion of the interface layer to the support

Methodology Applied
Scientific EffectAdhesion: Adhesive

Implementation Method 2

the interface layer is formed from a metal which is oxidized under conditions of nanotube synthesis or during exposure to air after nanotube growth to form a suitable metal oxide

Methodology Applied
Scientific EffectOxidation: Oxidation

Implementation Method 3

The catalytic layer is typically a thin film formed from a transition metal that can catalyze the formation of carbon nanotubes via chemical vapor deposition

Methodology Applied
Scientific EffectCatalysis: Catalysis

Implementation Method 4

CNTs exhibit high thermal conductivity, with multi-wall carbon nanotubes (MWCTs) exhibiting thermal conductivities up to about 3,000 W/mK at room temperature

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentUS9833772B2Vertically aligned arrays of carbon nanotubes formed on multilayer substrates
Publication Date: 2017.12.05 CARBICE CORP
  • US9833772B2 patent drawing
  • US9833772B2 patent drawing
  • US9833772B2 patent drawing

AI summary

Multilayer substrates for the growth and/or support of CNT arrays are provided. These multilayer substrates both promote the growth of dense vertically aligned CNT arrays and provide excellent adhesion between the CNTs and metal surfaces. Carbon nanotube arrays formed using multilayer substrates, which exhibit high thermal conductivity and excellent durability, are also provided. These arrays can be used as thermal interface materials.