Multilayer Torsion Spring Structure for Low-Lateral-Sensitivity Sensors
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Solution Overview
Problem
Conventional micromechanical inertial sensors face issues with lateral sensitivity to accelerations and interference from high-frequency vibrations due to the mechanical properties of torsion springs, which are not adequately stiff against bending loads and are prone to signal errors from in-plane excitations.
Innovation Solution
A spring unit with a first and second spring web, optionally including a third spring web, is designed to provide torsional flexibility and high stiffness against bending, featuring an H-shaped or O-shaped cross-sectional profile, which can be manufactured using semiconductor processes and adapted for complex mass distributions, reducing lateral sensitivity by setting the z coordinate of the torsional axis.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If the mass structure is enclosed by fixed stops, then the mass structure is constrained, but signal errors occur due to mechanical impact during in-plane excitations
Solution Approach 1:
The patent modifies the mechanical parameters of the spring unit, specifically optimizing the stiffness and damping characteristics to reduce the amplitude and impact of in-plane excitations. By adjusting the spring constants and damping coefficients, the system minimizes mechanical impacts during vibrations, thereby reducing vibration rectification errors while maintaining proper mass structure constraint.
2Ease of operation
If the spring unit has high yielding behavior, then torsional movement is enabled, but lateral sensitivity to accelerations increases
Solution Approach 1:
The patent applies different material properties and structural characteristics to different regions of the spring unit. The first spring web is designed with higher yielding behavior to enable torsional movement, while the second spring web is designed with higher stiffness to resist lateral deformations. This local differentiation allows the spring unit to maintain torsional flexibility while reducing lateral sensitivity and improving measurement precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively reduces lateral sensitivity and enhances the robustness of the spring unit against vibration-induced signal errors, improving the accuracy of acceleration sensors by providing controlled mechanical properties and reduced material tensions.
Implementation Method 1
The spring unit includes a first spring web and a second spring web, which are spaced apart from one another along a z direction... the mass structure being pivotable with the aid of the spring unit along an axis in relation to the substrate
Implementation Method 2
a spring unit which has a settable resilience with respect to the torsional movement and a high stiffness in relation to a bending load along the substrate surface
Data Source
AI summary
A component is described, in particular an inertial sensor for detecting acceleration forces, including a substrate, a mass structure, and a spring unit, the mass structure being pivotable along an axis in relation to the substrate with the aid of the spring unit, the spring unit including a first spring web and a second spring web, which are spaced apart from one another along a z direction. Furthermore, a method for manufacturing a spring unit is described.