Multi-Layer Vacuum Electron Fabrication for Batch-Built 3D VEDs

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Solution Overview

Problem

The existing manufacturing processes for vacuum electron devices (VEDs) are labor-intensive, time-consuming, and costly, requiring skilled labor and large clean rooms to produce individual devices, which cannot meet the growing demand for high quantities at lower costs, especially for devices operating in the microwave, millimeter wave, and near-terahertz frequencies.

Innovation Solution

A multi-layered multi-material manufacturing process where parallel sheets of conductive, magnetic, and insulator materials are bonded together to form three-dimensional VEDs, allowing for simultaneous production of multiple devices in a batch, which can then be cut into individual units, incorporating magnetic and electrostatic focusing mechanisms for electron beam control.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional individual device manufacturing is used, then device quality and precision are maintained, but production time and cost increase significantly

Engineering Contradiction:
Improvedevice fabrication precisionVSAvoidproduction quantity
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The device is divided into multiple two-dimensional layers that can be independently fabricated and then assembled into three-dimensional structures. This segmentation allows parallel processing of multiple devices simultaneously while maintaining precision through controlled layer-by-layer assembly and bonding.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The manufacturing process transitions from traditional three-dimensional individual device fabrication to a two-dimensional layered approach. Multiple devices are fabricated in parallel on the same layer plane, then stacked vertically to form three-dimensional structures, enabling high-volume production without sacrificing precision.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Reliability

If skilled labor and large clean rooms are used, then device reliability is ensured, but manufacturing cost and complexity increase

Engineering Contradiction:
Improvedevice reliabilityVSAvoidmanufacturing process complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The manufacturing process is segmented into standardized layer fabrication and assembly steps that can be automated. This reduces dependence on skilled manual labor while maintaining reliability through consistent, repeatable processes.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The layered structure and bonding process are designed to be self-aligning and self-assembling to the extent possible, reducing the need for complex manual manipulation and clean room requirements. The process enables automated manufacturing while preserving device reliability.

Inventive Principle:
Principle #25Self-service

3Manufacturing precision

If individual device production is used, then quality control is maintained, but per-device cost increases

Engineering Contradiction:
Improvequality controlVSAvoidper-device manufacturing cost
Core Design Contradiction:
Manufacturing precisionVSEase of manufacture

Solution Approach 1:

Multiple devices are merged into a single batch production process using the layered approach. All devices share common fabrication steps and bonding processes, spreading the manufacturing cost across many units while maintaining quality control through standardized procedures.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The layered manufacturing process is designed to be universal, accommodating multiple device types and configurations using the same fundamental approach. This multi-functionality reduces per-device cost by eliminating the need for dedicated manufacturing lines for each device variant.

Inventive Principle:
Principle #6Universality (Multi-functionality)

4Reliability

If traditional assembly methods are used, then device performance is achieved, but production time extends to weeks

Engineering Contradiction:
Improvedevice performanceVSAvoidmanufacturing cycle time
Core Design Contradiction:
ReliabilityVSLoss of time

Solution Approach 1:

Multiple device layers are fabricated and prepared in advance before final assembly. This preliminary action allows parallel processing of multiple devices simultaneously, dramatically reducing the overall manufacturing cycle time while maintaining performance through controlled assembly procedures.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The manufacturing process is designed as a continuous flow where layers are fabricated, bonded, and assembled without interruption. This continuous production approach eliminates idle time between steps and enables rapid manufacturing while preserving device performance through consistent process control.

Inventive Principle:
Principle #20Continuity of useful action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach significantly reduces per-device manufacturing costs, enables precise control of electron beams, and allows for the production of high-frequency VEDs with improved magnetic field strength and electrostatic focusing, facilitating the rapid production of high-bandwidth data communication devices.

Implementation Method 1

incorporating magnetic and electrostatic focusing mechanisms for electron beam control

Methodology Applied
Scientific EffectMagnetic field: Magnetic Field

Implementation Method 2

Electronic magneto-electrostatic sensing, focusing, and steering of electron beams

Methodology Applied
Scientific EffectLorentz force: Lorentz Force

Implementation Method 3

incorporating magnetic and electrostatic focusing mechanisms for electron beam control

Methodology Applied
Scientific EffectElectrostatic field: Electric Field

Implementation Method 4

parallel sheets of conductive, magnetic, and insulator materials are bonded together to form three-dimensional VEDs

Methodology Applied
Scientific EffectDiffusion bonding: Diffusion Welding

Data Source

PatentUS11894208B2Multi-layer vacuum electron device and method of manufacture
Publication Date: 2024.02.06 ELVE INC
  • US11894208B2 patent drawing
  • US11894208B2 patent drawing
  • US11894208B2 patent drawing

AI summary

Vacuum electron devices (VEDs) having a plurality of two-dimensional layers of various materials are bonded together to form one or more VEDs simultaneously. The two-dimensional material layers are machined to include features needed for device operation so that when assembled and bonded into a three-dimensional structure, three-dimensional features are formed. The two-dimensional layers are bonded together into a sandwich-like structure. The manufacturing process enables incorporation of metallic, magnetic, ceramic materials, and other materials required for VED fabrication while maintaining required positional accuracy and multiple devices per batch capability.