Multi-Layer Waveguide Stacking With Preformed Block Alignment
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Solution Overview
Problem
Current methods for manufacturing multi-layer waveguide optical couplers are time-consuming and material-intensive due to the need for depositing and patterning of cladding and core layers, and alignment of layers is not efficiently addressed.
Innovation Solution
A method involving direct stacking of optical waveguide blocks with alignment marks, using heating, thinning, and silicon oxide layers to form a multi-layer waveguide stack, enhancing alignment and reducing process time and cost.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If traditional methods of depositing cladding and core layers are used, then waveguide layers can be formed, but process time and material consumption increase significantly
Solution Approach 1:
The patent applies preliminary action by pre-forming complete waveguide blocks with integrated cladding and core layers before stacking. The waveguide blocks are prepared in advance with precise layer structures already in place, eliminating the need for time-consuming in-situ deposition during the main manufacturing process. This pre-preparation of components resolves the contradiction between achieving precise waveguide layer formation and reducing overall process time.
Solution Approach 2:
The patent merges the cladding layer and core layer into a single integrated waveguide block structure that is pre-assembled before stacking. By combining multiple layers into a unified pre-formed block, the manufacturing process eliminates sequential deposition steps, significantly reducing process time while maintaining the precision of layer formation through controlled block fabrication and stacking.
2Manufacturing precision
If traditional deposition and patterning methods are used for each layer, then waveguide structures can be created, but material consumption increases
Solution Approach 1:
The patent merges multiple waveguide blocks with pre-formed cladding and core layers into a stacked configuration. This approach eliminates the need for additional material deposition in the stacking process, reducing material consumption while maintaining manufacturing precision through the use of pre-engineered blocks that require no further material addition during assembly.
Solution Approach 2:
The waveguide blocks are pre-formed with all necessary cladding and core layers already in place before the stacking operation. This preliminary preparation ensures that materials are efficiently utilized during block fabrication, and no additional material is consumed during the stacking process itself, resolving the contradiction between precise structure formation and material conservation.
3Manufacturing precision
If alignment marks are added to optical waveguide blocks, then stacking alignment improves, but additional patterning steps are required
Solution Approach 1:
The patent applies local quality by adding alignment marks only at specific locations on the waveguide blocks rather than patterning the entire structure. The alignment marks are locally introduced at critical positions to provide reference points for stacking, improving alignment precision without requiring complex global patterning operations. This localized approach resolves the contradiction between achieving precise stacking alignment and minimizing device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method saves process time and cost while improving manufacturing yield by enabling efficient alignment of stacked optical waveguide blocks.
Implementation Method 1
applying a silicon oxide layer on the upper surface of the first optical waveguide block
Implementation Method 2
performing a heating process to allow the first optical waveguide block to bond with the flipped second optical waveguide through the silicon oxide layer
Data Source
AI summary
The present invention relates to a preparation method of multi-layer stacked waveguide. The method involves a preliminary step: providing an optical waveguide block, wherein the optical waveguide block has a substrate and a plurality of optical waveguides, the optical waveguides are disposed within the substrate and adjacent to an upper surface of the substrate; and a bonding step: flipping over another optical waveguide block and bonding it above the optical waveguide block to form a double-layer stacked waveguide structure. In this way, a multi-layer waveguide stack structure can be formed by directly stacking optical waveguide blocks directly provided with a plurality of optical waveguides. Multi-layer stacking only needs to be completed by heating, thinning and/or depositing a silicon oxide layer, saving manufacturing time and cost.