Multilayer X-ray Target Segmented Cooling
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Solution Overview
Problem
Conventional X-ray sources face limitations in heat removal, leading to reduced X-ray flux and potential damage due to excessive thermal buildup, which restricts their operational efficiency and lifespan, especially when relying on macroscopic cooling methods that do not effectively manage heat near the electron beam impact area.
Innovation Solution
A multi-layer X-ray source target structure is introduced, featuring alternating layers of X-ray generating material and thermally-conductive material, which enhances heat dissipation by strategically placing thermally-conductive layers within or adjacent to the X-ray generating layers, allowing for improved cooling efficiency and increased power handling without overheating.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If conventional cooling methods (rotation or active cooling) are used, then heat removal capability is improved, but the amount of deposited heat is limited and the overall X-ray flux is reduced
Solution Approach 1:
The target is divided into multiple discrete heat removal zones or segments, allowing different regions to be cooled independently and simultaneously, thereby increasing the total heat removal capacity without limiting the deposited heat
Solution Approach 2:
Heat removal occurs in multiple dimensions or directions simultaneously through the segmented cooling architecture, enabling greater heat dissipation efficiency and supporting higher X-ray flux generation
2Temperature
If the target is actively cooled, then heat removal is improved, but the cooling occurs far from the electron beam impact area which significantly limits the electron beam power
Solution Approach 1:
Cooling capability is localized to the electron beam impact area through segmented cooling structures positioned at or near the heat generation source, enabling effective heat removal from the focal spot and allowing higher electron beam power to be applied
3Temperature
If rotation is used to avoid overheating, then heat management is improved, but the amount of deposited heat is limited by rotation speed, target heat storage, radiation and conduction
Solution Approach 1:
The rotating cooling elements are extracted from the traditional rotating target configuration and positioned independently, allowing the target to remain stationary while cooling segments move or are positioned to provide effective heat removal without the constraints of rotating the entire target assembly
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables higher X-ray flux and power operation while maintaining lower target temperatures, extending the source's operational lifetime and enabling smaller spot sizes for improved feature detectability and faster inspection times.
Implementation Method 1
at least one thermally-conductive layer between each pair of X-ray generating layers
Implementation Method 2
A large portion of the energy deposited into the target by the electron beam produces heat within the target
Implementation Method 3
another portion of the energy resulting in the production of X-ray radiation
Data Source
AI summary
In one embodiment, an X-ray source target is provided that includes two or more layers of X-ray generating material at different depths within a source target for an electron beam. In one such embodiment the X-ray generating material in each layer does not extend fully across an underlying substrate surface.