Multilayer X-ray Target Heat Dissipation via Segmented Tungsten

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Solution Overview

Problem

Conventional X-ray sources face limitations in X-ray flux generation due to excessive heat buildup, which can damage the target and restrict electron beam power, leading to reduced X-ray flux and increased system volume and weight, especially when cooling methods are inefficient or require rotating components.

Innovation Solution

A multi-layer X-ray source target with varying thickness X-ray generating layers and thermally conductive layers to enhance heat dissipation, allowing for higher power operation and smaller spot sizes while maintaining target temperature, thereby increasing X-ray flux and operational lifetime.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If the target is actively cooled, then heat removal capability is improved, but the electron beam power that can be applied is significantly limited and X-ray flux is reduced

Engineering Contradiction:
Improvetarget temperatureVSAvoidX-ray flux
Core Design Contradiction:
TemperatureVSProductivity

Solution Approach 1:

The target is divided into multiple thin X-ray generating layers separated by thermally conductive layers. This segmentation allows heat to be conducted away through the thermally conductive layers while each X-ray generating layer maintains sufficient thickness for X-ray production, resolving the conflict between heat removal and X-ray flux generation

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The target uses a composite structure combining X-ray generating materials (such as tungsten) with high thermal conductivity materials (such as diamond or copper). This composite design enables simultaneous heat dissipation through the thermally conductive material and X-ray generation through the high-Z material layers, allowing high electron beam power without target melting

Inventive Principle:
Principle #40Composite materials

2Temperature

If the target is rotated to avoid overheating, then heat management is improved, but the amount of deposited heat is limited by rotation speed and bearing life, increasing system volume and weight

Engineering Contradiction:
Improvetarget temperatureVSAvoidsystem volume and weight
Core Design Contradiction:
TemperatureVSDevice complexity

Solution Approach 1:

The target is segmented into multiple thin layers with thermally conductive material between them, enabling heat to be conducted away in the thickness direction rather than requiring rotation. This eliminates the need for rotating components, bearings, and associated support structures, reducing system volume and weight while maintaining effective heat management

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The mechanical rotation system is replaced with a thermal conduction-based heat management system. Instead of using mechanical rotation to distribute heat, the patent uses thermally conductive layers to conduct heat away from the X-ray generating layers, eliminating moving parts and reducing system complexity

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Temperature

If conventional cooling methods are used, then heat removal is provided, but cooling occurs far from the electron beam impact area, significantly limiting electron beam power

Engineering Contradiction:
Improvetarget temperatureVSAvoidelectron beam power
Core Design Contradiction:
TemperatureVSPower

Solution Approach 1:

The target structure provides different local properties: X-ray generating layers at the electron beam impact area for X-ray production, and thermally conductive layers for heat removal. This local differentiation allows heat to be conducted away immediately at the impact area rather than relying on distant cooling, enabling high electron beam power application

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The multi-layer design effectively manages heat dissipation, enabling higher X-ray flux and smaller feature detectability, reducing operational costs by extending the life of the X-ray source and allowing for continuous high-power operation without overheating.

Implementation Method 1

at least one intervening thermally-conductive layer between each pair of X-ray generating layers

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 2

A large portion of the energy deposited into the target by the electron beam produces heat within the target, with another portion of the energy resulting in the production of X-ray radiation

Methodology Applied
Scientific EffectElectron beam impact: Electron Beam

Data Source

PatentUS9646801B2Multilayer X-ray source target with high thermal conductivity
Publication Date: 2017.05.09 MANTHEY DIANE MANT
  • US9646801B2 patent drawing
  • US9646801B2 patent drawing
  • US9646801B2 patent drawing

AI summary

In various embodiments, a multi-layer X-ray source target is provided having two or more layers of target material at different depths and different thicknesses. In one such embodiment the X-ray generating layers increase in thickness in relationship to their depth relative to the electron beam facing surface of the source target, such that X-ray generating layer further from this surface are thick than X-ray generating layers closer to the electron beam facing surface.