Multilevel Horological Component Manufacturing via UV-LIGA and Hot Stamping

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Solution Overview

Problem

Conventional LIGA technology and related methods are limited in manufacturing multilevel metal structures with complex geometries, such as bevels or chamfers, and can only produce parts with basic cylindrical geometries, restricting the creation of horological components with intricate designs.

Innovation Solution

A method combining hot stamping with LIGA technology, where a conductive layer is associated with a resin layer for each level, enabling reliable galvanic growth for multilevel components by shaping and defining resin layers with UV irradiation, followed by electroforming to produce components with complex geometries.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If conventional LIGA technology is used to manufacture multilevel metal structures, then the manufacturing process can be implemented, but the geometry is limited to basic cylindrical forms without complex features like bevels or chamfers

Engineering Contradiction:
Improvegeometry complexityVSAvoidmanufacturing capability
Core Design Contradiction:
Adaptability or versatilityVSEase of manufacture

Solution Approach 1:

The manufacturing process is divided into multiple iterative cycles, each cycle adding one level to the structure. Each level is created by applying photosensitive resin, performing hot stamping, irradiating, depositing conductive and metal layers, and removing sacrificial materials. This segmentation allows complex multilevel geometries to be built incrementally, resolving the contradiction between geometry complexity and manufacturing capability

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention introduces hot stamping as an additional processing dimension beyond conventional photolithography. By combining thermal forming (hot stamping) with photochemical processes (irradiation and development), the method enables creation of complex 3D geometries including bevels and chamfers that are impossible with traditional planar photolithography alone

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Adaptability or versatility

If a complete photoresist mould is produced before galvanic deposition, then multilevel parts can be manufactured, but only parts with projections included inside one another can be produced

Engineering Contradiction:
Improvepart configuration flexibilityVSAvoidgeometric constraint
Core Design Contradiction:
Adaptability or versatilityVSManufacturing precision

Solution Approach 1:

The manufacturing process is made dynamic and adaptive through iterative cycles. Rather than requiring all geometric constraints to be predetermined in a single mould design, the process allows each level to be added independently based on the previous level's configuration. This enables flexible part configurations where projections at different levels need not be nested, resolving the geometric constraint while maintaining manufacturing precision

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

Each level is prepared in advance through hot stamping and irradiation before metal deposition. The sacrificial resin structures are pre-formed with precise geometries, ensuring that the final metal parts achieve high manufacturing precision even as geometric flexibility increases through multiple levels

Inventive Principle:
Principle #10Preliminary action

3Manufacturing precision

If photosensitive polyimide is used for mould creation, then multilevel structures can be formed, but the process requires multiple iterative steps including depositing chromium and repeating the process for each additional level

Engineering Contradiction:
Improvemultilevel structure accuracyVSAvoidprocess complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The invention merges hot stamping, photoirradiation, and resin development into an integrated multi-step cycle that is repeated for each level. By combining these processes into a unified iterative framework, the method maintains high manufacturing precision for multilevel structures while managing process complexity through systematic repetition of standardized cycles

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The process parameters are systematically changed and optimized for each iterative cycle. The photosensitive resin formulation, hot stamping temperature and pressure, irradiation dosage, and development conditions are tuned to maintain consistent manufacturing precision across multiple levels, while the standardized parameter changes make the complex process more manageable

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables the production of multilevel metal horological components with complex geometries, such as pallets and escapement wheels, on a single wafer, offering improved reliability and versatility in manufacturing horological parts beyond the limitations of conventional LIGA technology.

Implementation Method 1

irradiating the first resin layer in order to define at least a first level of the component

Methodology Applied
Scientific EffectPhotopolymerization: Photopolymerisation

Implementation Method 2

The electrically conductive layer is implemented by global deposition on all the exposed surfaces

Methodology Applied
Scientific EffectPhysical vapor deposition: Physical Vapour Deposition

Implementation Method 3

depositing a metal layer by electroforming in the mould, starting from the conductive layer, in order to form the component

Methodology Applied
Scientific EffectElectroforming: Electrodeposition

Implementation Method 4

performing a hot stamping, using a stamp, of the first resin layer, by pressing the stamp up to a predefined distance from the substrate so as to keep a layer of resin

Methodology Applied
Scientific EffectHot stamping:

Data Source

PatentUS12037695B2Method for manufacturing a horological component and component produced according to said method
Publication Date: 2024.07.16 NIVAROX FAR SA
  • US12037695B2 patent drawing

AI summary

A method for manufacturing metal horological components, includes the steps of forming a multilevel mould made of a photosensitive resin, with a UV-LIGA method, and galvanically depositing a layer of at least one metal starting from a conductive layer in order to form a block that substantially reaches the upper surface of the photosensitive resin.