Multilevel Non-Sinusoidal Wave Circuit for Precise Plasma Voltage Control
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Solution Overview
Problem
Existing voltage generators struggle to generate various levels of output voltages efficiently and require complex circuit configurations, making them unsuitable for environments needing precise control over voltage levels in semiconductor manufacturing.
Innovation Solution
A non-sinusoidal signal generation device comprising a first rectangular wave circuit, a second rectangular wave circuit, and a sawtooth wave circuit, capable of applying positive and negative voltages and sawtooth voltages to a capacitive load using an inductor, allowing for the generation of high and low voltage signals through a multilevel input circuit.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If existing voltage generators are used to generate various levels of output voltages, then voltage control capability is improved, but circuit complexity increases
Solution Approach 1:
The voltage generator is divided into multiple independent rectangular wave circuits (first, second, third, and fourth rectangular wave circuits), each capable of generating rectangular wave signals with different voltage levels. By segmenting the voltage generation function across multiple circuits, the system achieves versatile voltage control without requiring a single complex circuit design.
Solution Approach 2:
Each rectangular wave circuit is designed with universal functionality to generate rectangular wave signals that can be combined in various ways. The circuits can operate independently or in combination, providing multiple output voltage levels (first, second, third, and fourth voltage levels) through different switching configurations, thereby achieving multi-functionality without increasing individual circuit complexity.
2Adaptability or versatility
If voltage generators are designed to generate various levels of voltages, then adaptability is improved, but ease of manufacture deteriorates
Solution Approach 1:
The system uses four separate rectangular wave circuits instead of one complex variable voltage generator. Each circuit is relatively simple in design and can be manufactured using standard fabrication processes. The segmentation allows each unit to be optimized for simplicity while the combination provides the required voltage level adaptability.
Solution Approach 2:
The voltage generation relies on periodic rectangular wave signals from each circuit, which can be generated using standard oscillators and switching elements. The periodic nature of the signals simplifies the circuit design compared to continuous variable voltage generation, making the circuits easier to manufacture while still achieving various voltage levels through selective switching and combination.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the generation of various output signals, including high voltage rectangular and sawtooth wave signals, facilitating efficient and precise voltage control in semiconductor manufacturing facilities.
Implementation Method 1
a sawtooth wave circuit configured to be able to apply one sawtooth voltage to the output terminal, wherein the sawtooth wave circuit includes an inductor configured to draw current from a capacitive load connected to the output terminal
Data Source
AI summary
The present embodiment provides a non-sinusoidal signal generation device comprising: a first rectangular wave circuit configured to be able to apply positive voltages of two different magnitudes to an output terminal; a second rectangular wave circuit configured to be able to apply one negative voltage to the output terminal; and a sawtooth wave circuit configured to be able to apply one sawtooth voltage to the output terminal, wherein the sawtooth wave circuit includes an inductor configured to draw current from a capacitive load connected to the output terminal.