Multilevel Waveguide Structure for Photonic Integrated Circuits

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Solution Overview

Problem

Current photonic integrated circuits (PICs) using SOI wafers face challenges in efficiently directing optical beams between different layers due to limitations in optical coupling, leading to inefficiencies in area usage and increased noise within the silicon layers.

Innovation Solution

The method involves forming integrated optical structures with planar layers where a first optical waveguide in one SOI layer is coupled to a second waveguide in another SOI layer through a vertically positioned optical coupler, allowing the optical beam to be directed perpendicular and parallel to the layers, thereby optimizing space and reducing noise by using a double BOX SOI wafer with embedded waveguides and vertical couplers.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If optical beams are directed between different layers in conventional PICs, then optical coupling is achieved, but area usage efficiency deteriorates and noise increases

Engineering Contradiction:
Improveoptical coupling efficiencyVSAvoidchip area
Core Design Contradiction:
ReliabilityVSArea of stationary object

Solution Approach 1:

The patent transitions from planar optical coupling to three-dimensional vertical coupling by positioning waveguides in different layers separated by BOX structures. Optical beams are directed vertically between layers through the insulator, enabling efficient inter-layer communication without requiring additional lateral chip area.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The chip is divided into multiple layers with distinct functions: first layer for optical input, intermediate insulator layer for isolation, second layer for optical processing, and third layer for electrical devices. This segmentation allows independent optimization of each layer while reducing inter-layer interference and noise.

Inventive Principle:
Principle #1Segmentation

2Reliability

If optical beams are directed between different layers in conventional PICs, then optical coupling is achieved, but noise within silicon layers increases

Engineering Contradiction:
Improveoptical coupling efficiencyVSAvoidnoise
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

A thick insulator layer (BOX structure) is introduced as an intermediary between optical and electrical layers. This insulator acts as a noise barrier that isolates optical beams from electrical noise generated in the third layer, while still permitting optical coupling through the insulator material.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The harmful electrical noise is extracted and isolated from the optical path by placing electrical devices in a separate third layer, physically removed from the optical signal path. The insulator layer serves as a barrier that extracts noise from the system while maintaining optical functionality.

Inventive Principle:
Principle #2Taking out (Extraction)

3Reliability

If conventional bonding methods are used to form SOI wafers, then device performance is achieved, but manufacturing complexity increases

Engineering Contradiction:
Improvedevice performanceVSAvoidmanufacturing process
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

Multiple SOI layers are nested vertically with insulator layers between them, forming a compact multi-layer structure. Each layer is bonded to the previous layer through standard bonding processes, creating a stacked configuration that maximizes vertical space utilization while maintaining manufacturing simplicity.

Inventive Principle:
Principle #7Nested doll (Nesting)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances optical coupling efficiency, saves chip area, and reduces noise by allowing the optical signal to be transferred between different silicon levels, improving the connection between fiber-optic cables and the chip while freeing up space for electronic and optical devices.

Implementation Method 1

the optical coupler transmits the optical beam from the first optical waveguide (that is in the second wafer layer) to the second optical waveguide (that are in the third wafer layer) through the second insulator layer

Methodology Applied
Scientific EffectOptical coupling: Refraction

Data Source

PatentUS9606291B2Multilevel waveguide structure
Publication Date: 2017.03.28 GLOBALFOUNDRIES US INC
  • US9606291B2 patent drawing
  • US9606291B2 patent drawing
  • US9606291B2 patent drawing

AI summary

Integrated optical structures include a first wafer layer, a first insulator layer directly connected to the top of the first wafer layer, a second wafer layer directly connected to the top of the first insulator layer, a second insulator layer directly connected to the top of the second wafer layer, and a third wafer layer directly connected to the top of the second insulator layer. Such structures include: a first optical waveguide positioned within the second wafer layer; an optical coupler positioned within the second wafer layer, the second insulator layer, and the third wafer layer; and a second optical waveguide positioned within the third wafer layer. The optical coupler transmits an optical beam from the first optical waveguide to the second optical waveguide through the second insulator layer.